Abstract: The present invention provides a vibration isolation system which can prevent transmission of vibration from a transfer unit or other unit to a vacuum chamber, and can accurately perform positioning of the vacuum chamber connected to an elastic member having a simple structure and a transfer space therein. The present invention includes a vacuum chamber (11) placed on a vibration isolation unit, a transfer chamber (13) having a transfer space through which a work is transferred into the vacuum chamber (11), an elastic member (15) for connecting the vacuum chamber (11) and the transfer chamber (13), an actuator (24, 24) for elastically supporting the vacuum chamber (11) with respect to a fixed-side member, a position sensor (22) for detecting a displacement of the vacuum chamber (11) with respect to the fixed-side member, and a control unit (23) for controlling the actuator (24) based on output of the position sensor.