Patents by Inventor Yoshinori Maeno
Yoshinori Maeno has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7843649Abstract: A method of fabricating a microlens that serves to prevent damage thereto in the fabrication process is provided. First, a lens body of which the maximum height housed within a recess is lower than the height of the side wall of the recess is formed in the lens formation region by performing patterning that transfers the shape of a first resist pattern to a substrate by using the first resist pattern as an etching mask. Thereafter, a partial region of the substrate which is outside the lens formation region is removed to form an outline by using a second resist pattern as a mask.Type: GrantFiled: April 26, 2007Date of Patent: November 30, 2010Assignee: Oki Semiconductor Co., Ltd.Inventor: Yoshinori Maeno
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Patent number: 7829247Abstract: A photomask includes a transparent mask substrate, and a plurality of square mask cells provided on the mask substrate. Each mask cell includes at least one of a light transmitting region and a light shielding region. A planar region (in which the mask cells are formed) of the mask substrate includes a first region, a second region surrounding the first region, and a third region outside the second region. The first region includes a first group of mask cells transmitting lights of a first light intensity greater than zero and less than or equal to 1. The second region includes a second group of mask cells transmitting lights of a second light intensity greater than zero and less than the first light intensity. The third region includes a third group of mask cells transmitting lights of a third light intensity greater than or equal to zero and less than the second light intensity.Type: GrantFiled: August 20, 2007Date of Patent: November 9, 2010Assignee: Oki Semiconductor Co., Ltd.Inventor: Yoshinori Maeno
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Patent number: 7585422Abstract: A new and improved optical element manufacturing method, through which lens elements can be efficiently mounted on a silicon V-shaped groove substrate at lower manufacturing costs, is provided. The method comprises a lens element forming step in which an oxide layer 104 is formed at a supporting layer 102 and lens elements 120 are formed at the upper surface of the silicon oxide film, a coating step in which a solder connection metal film is coated onto the side surfaces of the lens elements and a separating step in which the lens elements are separated by removing the silicon oxide film. Through this method, the solder connection metal film can be formed with ease at the sidewalls of the lens elements. The lens elements with the solder connection metal film formed at the side walls thereof can easily be soldered onto a supporting substrate.Type: GrantFiled: March 14, 2006Date of Patent: September 8, 2009Assignee: Oki Electric Industry Co., Ltd.Inventors: Yoshinori Maeno, Daisuke Shimura
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Publication number: 20090087794Abstract: Object To provide a diffractive optical element manufacturing method through which a high-precision diffractive optical element is formed to assure an improvement in the diffraction efficiency. Means for Solving the Problems A diffractive optical element assuming cyclical stage patterns is manufactured through a procedural sequence of steps of exposing and developing a substrate 1 with a resist 2 applied thereupon by using a mask to form a resist pattern and then repeatedly etching the substrate by using resist pattern. In a first process, a pattern defining widths matching the widths of the stages to be formed is formed and greater pattern widths are set for subsequent processes.Type: ApplicationFiled: May 2, 2005Publication date: April 2, 2009Applicant: OKI ELECTRIC INDUSTRY CO., LTD.Inventors: Ryo Sekikawa, Yoshinori Maeno
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Patent number: 7508585Abstract: The diffraction optical element production method includes a first step of etching an area which becomes a seventh step of a seven-step staircase shape and an area which becomes a third step of a three-step staircase shape by a depth 2L; a second step of etching areas which become second, fourth, and sixth steps of the seven-step staircase shape and an area which becomes a first step of the three-step staircase shape by a depth L; a third step of etching areas which become fifth to seventh steps of the seven-step staircase shape and areas which become second and third steps of the three-step staircase shape by the depth 2L; and a fourth step of etching areas which become third to seventh steps of the seven-step staircase shape and areas which become second and third steps of the three-step staircase shape by the depth 2L.Type: GrantFiled: June 6, 2006Date of Patent: March 24, 2009Assignee: Oki Electric Industry Co., Ltd.Inventor: Yoshinori Maeno
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Publication number: 20080080068Abstract: A method of fabricating a microlens that serves to prevent damage thereto in the fabrication process is provided. First, a lens body of which the maximum height housed within a recess is lower than the height of the side wall of the recess is formed in the lens formation region by performing patterning that transfers the shape of a first resist pattern to a substrate by using the first resist pattern as an etching mask. Thereafter, a partial region of the substrate which is outside the lens formation region is removed to form an outline by using a second resist pattern as a mask.Type: ApplicationFiled: April 26, 2007Publication date: April 3, 2008Applicant: OKI ELECTRIC INDUSTRY CO., LTD.Inventor: Yoshinori Maeno
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Publication number: 20080076041Abstract: A photomask includes a transparent mask substrate, and a plurality of square mask cells provided on the mask substrate. Each mask cell includes at least one of a light transmitting region and a light shielding region. A planar region (in which the mask cells are formed) of the mask substrate includes a first region, a second region surrounding the first region, and a third region outside the second region. The first region includes a first group of mask cells transmitting lights of a first light intensity greater than zero and less than or equal to 1. The second region includes a second group of mask cells transmitting lights of a second light intensity greater than zero and less than the first light intensity. The third region includes a third group of mask cells transmitting lights of a third light intensity greater than or equal to zero and less than the second light intensity.Type: ApplicationFiled: August 20, 2007Publication date: March 27, 2008Applicant: OKI ELECTRIC INDUSTRY CO., LTD.Inventor: Yoshinori Maeno
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Publication number: 20060279844Abstract: The diffraction optical element production method includes a first step of etching an area which becomes a seventh step of a seven-step staircase shape and an area which becomes a third step of a three-step staircase shape by a depth 2L; a second step of etching areas which become second, fourth, and sixth steps of the seven-step staircase shape and an area which becomes a first step of the three-step staircase shape by a depth L; a third step of etching areas which become fifth to seventh steps of the seven-step staircase shape and areas which become second and third steps of the three-step staircase shape by the depth 2L; and a fourth step of etching areas which become third to seventh steps of the seven-step staircase shape and areas which become second and third steps of the three-step staircase shape by the depth 2L.Type: ApplicationFiled: June 6, 2006Publication date: December 14, 2006Applicant: Oki Electric Industry Co., Ltd.Inventor: Yoshinori Maeno
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Publication number: 20060201199Abstract: A new and improved optical element manufacturing method, through which lens elements can be efficiently mounted on a silicon V-shaped groove substrate at lower manufacturing costs, is provided. The method comprises a lens element forming step in which an oxide layer 104 is formed at a supporting layer 102 and lens elements 120 are formed at the upper surface of the silicon oxide film, a coating step in which a solder connection metal film is coated onto the side surfaces of the lens elements and a separating step in which the lens elements are separated by removing the silicon oxide film. Through this method, the solder connection metal film can be formed with ease at the sidewalls of the lens elements. The lens elements with the solder connection metal film formed at the side walls thereof can easily be soldered onto a supporting substrate.Type: ApplicationFiled: March 14, 2006Publication date: September 14, 2006Applicant: Oki Electric Industry Co., Ltd.Inventors: Yoshinori Maeno, Daisuke Shimura
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Patent number: 7102835Abstract: A lens element 1 is formed by making use of an optical substrate, and includes a lens portion 2, an edge portion 6 in the form of a circular arc provided along the circumference of the lens portion 2, and a handling portion 4 which is integrated with the lens portion 2 and the edge portion 6 as well and extends with a width wider than that of the lens portion 2. The handling portion 4 can be caught and held by chucking vacuum suction and so forth. The lens element 1 can be handled by catching the handling portion 4 without directly touching the lens element 1, and thus the lens element 1 is neither damaged nor contaminated, and stably handled with ease.Type: GrantFiled: September 16, 2005Date of Patent: September 5, 2006Assignee: Oki Electric Industry Co., Ltd.Inventors: Masahiro Uekawa, Kyoko Kotani, Hironori Sasaki, Takeshi Takamori, Yoshinori Maeno
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Patent number: 7027693Abstract: When an optical member which have a plurality of luminous flux converters formed in a line on a surface of an optical substrate is mounted on a support substrate having at least one groove, at least two parts of the side surfaces of the optical member are brought into contact with the groove to perform positioning, and an adhesive agent is filled between at least one part of a portion which opposes the groove on the plane of the optical member and which is not in contact with the groove and the support substrate to cause the optical member and the support substrate to adhere to each other.Type: GrantFiled: August 20, 2003Date of Patent: April 11, 2006Assignee: Oki Electric Industry Co., Ltd.Inventor: Yoshinori Maeno
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Patent number: 7016127Abstract: A lens element 1 is formed by making use of an optical substrate, and includes a lens portion 2, an edge portion 6 in the form of a circular arc provided along the circumference of the lens portion 2, and handling portion 4 which is integrated with the lens portion 2 and the edge portion 6 as well and extends with a width wider than that of the lens portion 2. The handling portion 4 can be caught and held by chucking vacuum suction and so forth. The lens element 1 can be handled by catching the handling portion 4 without directly touching the lens element 1, and thus the lens element 1 is neither damaged nor contaminated, and stably handled with ease.Type: GrantFiled: May 27, 2004Date of Patent: March 21, 2006Assignee: Oki Electric Industry Co., Ltd.Inventors: Masahiro Uekawa, Kyoko Kotani, Hironori Sasaki, Takeshi Takamori, Yoshinori Maeno
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Publication number: 20060007566Abstract: A lens element 1 is formed by making use of an optical substrate, and includes a lens portion 2, an edge portion 6 in the form of a circular arc provided along the circumference of the lens portion 2, and a handling portion 4 which is integrated with the lens portion 2 and the edge portion 6 as well and extends with a width wider than that of the lens portion 2. The handling portion 4 can be caught and held by chucking vacuum suction and so forth. The lens element 1 can be handled by catching the handling portion 4 without directly touching the lens element 1, and thus the lens element 1 is neither damaged nor contaminated, and stably handled with ease.Type: ApplicationFiled: September 16, 2005Publication date: January 12, 2006Inventors: Masahiro Uekawa, Kyoko Kotani, Hironori Sasaki, Takeshi Takamori, Yoshinori Maeno
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Patent number: 6882478Abstract: A method for forming many microlenses comparatively easily and effectively is provided. On one end of an optical substrate is formed a plurality of lens planes at regular intervals. Lens areas containing the lens planes are partially covered by an etching mask and etching processing is performed on areas being exposed outside the etching mask to remove the areas to a specified depth. While the lens planes formed on one surface of the optical substrate are being held by a support substrate, polishing processing is performed on another end face of the optical substrate and each microlens formed in the lens areas is separated from the support substrate.Type: GrantFiled: July 16, 2004Date of Patent: April 19, 2005Assignee: Oki Electric Industrt Co., Ltd.Inventors: Yoshinori Maeno, Takeshi Takamori, Hironori Sasaki, Masahiro Uekawa
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Publication number: 20040263987Abstract: A method for forming many microlenses comparatively easily and effectively is provided. On one end of an optical substrate is formed a plurality of lens planes at regular intervals. Lens areas containing the lens planes are partially covered by an etching mask and etching processing is performed on areas being exposed outside the etching mask to remove the areas to a specified depth. While the lens planes formed on one surface of the optical substrate are being held by a support substrate, polishing processing is performed on another end face of the optical substrate and each microlens formed in the lens areas is separated from the support substrate.Type: ApplicationFiled: July 16, 2004Publication date: December 30, 2004Inventors: Yoshinori Maeno, Takeshi Takamori, Hironori Sasaki, Masahiro Uekawa
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Publication number: 20040240085Abstract: A lens element 1 is formed by making use of an optical substrate, and includes a lens portion 2, an edge portion 6 in the form of a circular arc provided along the circumference of the lens portion 2, and a handling portion 4 which is integrated with the lens portion 2 and the edge portion 6 as well and extends with a width wider than that of the lens portion 2. The handling portion 4 can be caught and held by using a grasping means, a vacuum sucking means and so forth. With this, the lens element 1 can be handled by catching the handling portion 4 without directly touching the lens element 1, thus the lens element 1 being neither damaged nor contaminated, and being stably handled with ease.Type: ApplicationFiled: May 27, 2004Publication date: December 2, 2004Inventors: Masahiro Uekawa, Kyoko Kotani, Hironori Sasaki, Takeshi Takamori, Yoshinori Maeno
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Patent number: 6798589Abstract: A lens element 1 is formed by making use of an optical substrate, and includes a lens portion 2, an edge portion 6 in the form of a circular arc provided along the circumference of the lens portion 2, and a handling portion 4 which is integrated with the lens portion 2 and the edge portion 6 as well and extends with a width wider than that of the lens portion 2. The handling portion 4 can be caught and held by using a grasping means, a vacuum sucking means and so forth. With this, the lens element 1 can be handled by catching the handling portion 4 without directly touching the lens element 1, thus the lens element 1 being neither damaged nor contaminated, and being stably handled with ease.Type: GrantFiled: December 2, 2003Date of Patent: September 28, 2004Assignee: Oki Electric Industry Co., Ltd.Inventors: Masahiro Uekawa, Kyoko Kotani, Hironori Sasaki, Takeshi Takamori, Yoshinori Maeno
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Patent number: 6790373Abstract: A method for forming many microlenses comparatively easily and effectively is provided. On one end of an optical substrate is formed a plurality of lens planes at regular intervals. Lens areas containing the lens planes are partially covered by an etching mask and etching processing is performed on areas being exposed outside the etching mask to remove the areas to a specified depth. While the lens planes formed on one surface of the optical substrate are being held by a support substrate, polishing processing is performed on another end face of the optical substrate and each microlens formed in the lens areas is separated from the support substrate.Type: GrantFiled: April 25, 2002Date of Patent: September 14, 2004Assignee: Oki Electric Industry Co., Ltd.Inventors: Yoshinori Maeno, Takeshi Takamori, Hironori Sasaki, Masahiro Uekawa
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Publication number: 20040109641Abstract: A lens element 1 is formed by making use of an optical substrate, and includes a lens portion 2, an edge portion 6 in the form of a circular arc provided along the circumference of the lens portion 2, and a handling portion 4 which is integrated with the lens portion 2 and the edge portion 6 as well and extends with a width wider than that of the lens portion 2. The handling portion 4 can be caught and held by using a grasping means, a vacuum sucking means and so forth. With this, the lens element 1 can be handled by catching the handling portion 4 without directly touching the lens element 1, thus the lens element 1 being neither damaged nor contaminated, and being stably handled with ease.Type: ApplicationFiled: December 2, 2003Publication date: June 10, 2004Inventors: Masahiro Uekawa, Kyoko Kotani, Hironori Sasaki, Takeshi Takamori, Yoshinori Maeno
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Patent number: 6721108Abstract: An optical lens device assembly is provided which is capable of being substantially free from a deviation in an optical axis of an optical lens caused by errors of its manufacturing, thus preventing a drop in coupling efficiency and enabling easy alignment of the optical axis of the optical lens. One of end faces of two optical lens is used as a lens plane and the two optical lens are optically in series coupled. The two optical lenses are placed in a manner that their non-lens planes face each other.Type: GrantFiled: April 29, 2002Date of Patent: April 13, 2004Assignee: Oki Electric Industry Co., Ltd.Inventors: Hironori Sasaki, Masahiro Uekawa, Takeshi Takamori, Yoshinori Maeno