Patents by Inventor Yoshinori MORISADA MORISADA

Yoshinori MORISADA MORISADA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • CARBON HARD MASK, FILM FORMING APPARATUS, AND FILM FORMING METHOD
    Publication number: 20220042173
    Abstract: According to one embodiment, there is provided a carbon hard mask laminated on an etching target film, in which the concentration ratio of a methylene group CH2 and a methyl group CH3 contained in the carbon hard mask satisfies the expression CH2/(CH2+CH3)?0.5.
    Type: Application
    Filed: December 4, 2019
    Publication date: February 10, 2022
    Inventors: Masaru HORI, Makoto SEKINE, Hirotsugu SUGIURA, Tsuyoshi MORIYA, Satoshi TANAKA, Yoshinori MORISADA MORISADA