Patents by Inventor Yoshinori Numata

Yoshinori Numata has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Defect inspecting apparatus
    Patent number: 7129727
    Abstract: A defect inspecting apparatus in which a plurality of probes to measure electric characteristics of a sample including a fine wiring pattern are combined with a charged-particle beam unit includes graphic user interfaces (GUI) to simply control the plural probes. The apparatus includes a probe image processing unit to display the plural probes on a display; a selecting unit to select, from the probes displayed on the display, a probe to be operated; and a display unit to simultaneously display the probe selecting unit and information indicating that the selected probe is an operable probe, or the probe is in a non-selected state.
    Type: Grant
    Filed: October 26, 2005
    Date of Patent: October 31, 2006
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Tsutomu Saito, Osamu Yamada, Eiichi Hazaki, Yasuhiko Nara, Hirofumi Sato, Yoshikazu Inada, Yoshinori Numata
  • Defect inspecting apparatus
    Publication number: 20060087330
    Abstract: A defect inspecting apparatus in which a plurality of probes to measure electric characteristics of a sample including a fine wiring pattern are combined with a charged-particle beam unit includes graphic user interfaces (GUI) to simply control the plural probes. The apparatus includes a probe image processing unit to display the plural probes on a display; a selecting unit to select, from the probes displayed on the display, a probe to be operated; and a display unit to simultaneously display the probe selecting unit and information indicating that the selected probe is an operable probe, or the probe is in a non-selected state.
    Type: Application
    Filed: October 26, 2005
    Publication date: April 27, 2006
    Inventors: Tsutomu Saito, Osamu Yamada, Eiichi Hazaki, Yasuhiko Nara, Hirofumi Sato, Yoshikazu Inada, Yoshinori Numata