Abstract: A method for forming a silicon-containing film in a recess formed on a surface of a substrate, the method includes: (a) forming a flowable film in the recess by exposing the substrate, which is adjusted to a first temperature, to plasma generated from a processing gas including a halogen-containing silane: and (b) curing the flowable film by thermally processing the substrate at a second temperature higher than the first temperature.

Abstract: A noise reduction system includes: a microjet ring (16) provided at an exhaust side peripheral edge of a main nozzle of a jet engine, and has a plurality of injection pipes (26) formed in a circumferential direction thereof at regular intervals; and a supply path configured to take part of compressed air in from a flow path in an upstream side of a combustor in the jet engine, and to guide the part of compressed air to the plurality of injection pipes (26), wherein the plurality of injection pipes (26) is configured to inject the part of compressed air to a jet flow.

Abstract: The present invention relates to a jet engine including protrusions (1) for preventing the increase of the velocity gradient of a fluid in a mixed layer of a jet flow and an external air flow by bending the mixed layer, when viewed from the side of a jet flow injected.

Abstract: A noise reducing device in a jet engine that has a cylindrical casing, a cylindrical partition wall that is inserted in the casing while protruding partially from a trailing edge of the casing, and a compressor that compresses air that is taken into the cylindrical partition wall, with the inside of the cylindrical partition wall serving as a duct in which a core stream of high-speed air flows, and the space between the cylindrical partition wall and the casing serving as a duct in which a bypass stream of low-speed air flows, and being connected with a wing of an airplane by a pylon that has a projection portion that extends beyond the casing to the downstream of the core stream and the bypass stream, the noise reducing device includes a nozzle, disposed at the pylon on the downstream of the core stream, that injects a fluid toward a noise generation source that is produced from the mutual approach of an ambient air stream that is produced outside of the bypass stream and the core stream.

Abstract: A noise reduction system with a chamber includes a chamber (17) which is provided at a portion of a supply path connecting a flow path in an upstream side of a combustor in a jet engine to a plurality of microjet nozzles which is provided at an exhaust side peripheral edge of a main nozzle of the jet engine, wherein the supply path is configured to supply part of compressed air from the flow path into the chamber (17), and the chamber (17) is configured to inject the compressed air through the plurality of the microjet nozzles (63) to a jet flow.

Abstract: A jet flow discharge nozzle includes a tubular partition wall, a tubular casing which covers an outer periphery of the tubular partition wall, and a bifurcation which extends in an axial direction of the tubular partition wall and the casing so as to support downstream ends of the tubular partition wall and the casing from outside. Inside of the tubular partition wall is defined as a flow path for a high-speed core flow. A space between the tubular partition wall and the casing is defined as a flow path for a low-speed bypass flow. A pair of first projections is provided at a downstream edge of the tubular partition wall near the bifurcation at positions symmetric about the bifurcation. One of ridges of each of the first projections faces an upstream side. The invention reduces noise by avoiding adverse effects of the presence of the bifurcation on an increase in noise.

Abstract: The present invention relates to a jet engine including protrusions (1) for preventing the increase of the velocity gradient of a fluid in a mixed layer of a jet flow and an external air flow by bending the mixed layer, when viewed from the side of a jet flow injected.

Abstract: A noise reduction system includes: a microjet ring (16) provided at an exhaust side peripheral edge of a main nozzle of a jet engine, and has a plurality of injection pipes (26) formed in a circumferential direction thereof at regular intervals; and a supply path configured to take part of compressed air in from a flow path in an upstream side of a combustor in the jet engine, and to guide the part of compressed air to the plurality of injection pipes (26), wherein the plurality of injection pipes (26) is configured to inject the part of compressed air to a jet flow.

Abstract: A noise reduction system with a chamber includes a chamber (17) which is provided at a portion of a supply path connecting a flow path in an upstream side of a combustor in a jet engine to a plurality of microjet nozzles which is provided at an exhaust side peripheral edge of a main nozzle of the jet engine, wherein the supply path is configured to supply part of compressed air from the flow path into the chamber (17), and the chamber (17) is configured to inject the compressed air through the plurality of the microjet nozzles (63) to a jet flow.

Abstract: A noise reducing device in a jet engine that has a cylindrical casing, a cylindrical partition wall that is inserted in the casing while protruding partially from a trailing edge of the casing, and a compressor that compresses air that is taken into the cylindrical partition wall, with the inside of the cylindrical partition wall serving as a duct in which a core stream of high-speed air flows, and the space between the cylindrical partition wall and the casing serving as a duct in which a bypass stream of low-speed air flows, and being connected with a wing of an airplane by a pylon that has a projection portion that extends beyond the casing to the downstream of the core stream and the bypass stream, the noise reducing device includes a nozzle, disposed at the pylon on the downstream of the core stream, that injects a fluid toward a noise generation source that is produced from the mutual approach of an ambient air stream that is produced outside of the bypass stream and the core stream.

Abstract: A jet flow discharge nozzle includes a tubular partition wall, a tubular casing which covers an outer periphery of the tubular partition wall, and a bifurcation which extends in an axial direction of the tubular partition wall and the casing so as to support downstream ends of the tubular partition wall and the casing from outside. Inside of the tubular partition wall is defined as a flow path for a high-speed core flow. A space between the tubular partition wall and the casing is defined as a flow path for a low-speed bypass flow. A pair of first projections is provided at a downstream edge of the tubular partition wall near the bifurcation at positions symmetric about the bifurcation. One of ridges of each of the first projections faces an upstream side. The invention reduces noise by avoiding adverse effects of the presence of the bifurcation on an increase in noise.