Patents by Inventor Yoshinori Obise

Yoshinori Obise has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ion beam irradiation device
    Patent number: 9595418
    Abstract: An ion beam irradiation device includes a vacuum chamber that accommodates a transport tray which holds a substrate, a transport unit that transports the transport tray in the vacuum chamber in a transport direction, an ion beam irradiation unit that irradiates, with ion beams, a predetermined irradiation position in the vacuum chamber, and a position detector that detects a position of the transport tray. The transport tray includes a plurality of indices that are arranged in the transport direction to indicate portions of the transport tray. The position detector images each of the indices at a predetermined imaging position during transportation of the transport tray and detects a position of the transport tray relative to the imaging position based on the imaged index.
    Type: Grant
    Filed: February 13, 2013
    Date of Patent: March 14, 2017
    Assignee: ULVAC, Inc.
    Inventors: Yoshiaki Yamamoto, Young-Doo Kim, Yoshinori Obise, Satohiro Okayama
  • ION BEAM IRRADIATION DEVICE
    Publication number: 20150179395
    Abstract: An ion beam irradiation device includes a vacuum chamber that accommodates a transport tray which holds a substrate, a transport unit that transports the transport tray in the vacuum chamber in a transport direction, an ion beam irradiation unit that irradiates, with ion beams, a predetermined irradiation position in the vacuum chamber, and a position detector that detects a position of the transport tray. The transport tray includes a plurality of indices that are arranged in the transport direction to indicate portions of the transport tray. The position detector images each of the indices at a predetermined imaging position during transportation of the transport tray and detects a position of the transport tray relative to the imaging position based on the imaged index.
    Type: Application
    Filed: February 13, 2013
    Publication date: June 25, 2015
    Applicant: ULVAC, INC.
    Inventors: Yoshiaki Yamamoto, Young-Doo Kim, Yoshinori Obise, Satohiro Okayama