Abstract: A vibrator is formed on a silicon substrate to become a base by the silicon-processing procedure and a thin film of a piezoelectric material is formed on the substrate by a method matching with the silicon-processing procedure. When an ac field of a frequency near the resonance frequency of the transverse vibration of the vibrator is applied to the thin film of the piezoelectric material, the piezoelectric reverse effect excites characteristic vibration in the vibrator. If a rotational motion is generated along the axis of the beam in that state, the Coriolis' force is generated in a direction perpendicular to both the axial direction and the vibration direction of the beam. This force deforms the beam in that direction. Detecting inductive charges produced in another piezoelectric thin film fixed on the vibrator because of the piezoelectric normal effect due to the deformation, the rotational, angular velocity can be obtained.

Abstract: When a power switch is turned on, first and second analog switches are turned on while a third analog switch is turned off. Accordingly, at the time of starting, a forced excitation driving circuit supplies to a vibrator an oscillation output pulse which is substantially at the resonance frequency of the vibrator, thereby forcibly driving the vibrator in an excitation manner. Thereafter, when the vibrator substantially attains its stationary state and thereby the charged voltage of a capacitor reaches a threshold value of an inverter, the first and second analog switches are turned off while the third analog switch is turned on. Accordingly, the output of a self-excitation circuit is supplied to the electrode of the vibrator so as to vibrate the vibrator in a self-excitation manner.

Abstract: A piezoelectric angular velocity meter includes a piezoelectric element. The piezoelectric element includes a first piezoelectric element and a second piezoelectric element bonded to the first piezoelectric element. The second piezoelectric element includes a second member made of a piezoelectric crystal, and upper- and lower-surface electrodes sandwiching the second member. The first piezoelectric element is fixed to the upper-surface electrode of said second piezoelectric element with an adhesive. The first piezoelectric element includes a first member made of a piezoelectric crystal, upper-surface electrodes, and a lower-surface electrode. The upper- and lower-surface electrodes sandwich the first member of the first piezoelectric element. The piezoelectric element is supported by two support portions.

Abstract: Without necessitating complicated operations, an image of a low to medium magnification and an image of a high magnification are efficiently observed by an optical microscope and by an atomic force microscope, respectively. In the atomic force microscope, an atomic force microscope probe, whose size has been reduced since a device for detecting interatomic force is provided by a piezoelectric film, piezoresistance, or the like, is disposed between an objective lens of the optical microscope and a sample to be observed or at a position of the objective lens when the objective lens and the probe are constructed so as to be interchangeable, thereby enabling the optical microscope to confirm a scanning position of the atomic force microscope.

Abstract: A scanning probe microscope according to present invention comprises a cantilever for interaction with a surface, the cantilever having a self vibrator therein for vibrating the cantilever, the cantilever having a self strain detector therein. The self vibrator and self strain detector comprise a piezoelectric layer and electrodes, and the piezoelectric layer is disposed between these electrodes.

Abstract: When a power switch is turned on, first and second analog switches are turned on while a third analog switch is turned off. Accordingly, at the time of starting, a forced excitation driving circuit supplies to a vibrator an oscillation output pulse which is substantially at the resonance frequency of the vibrator, thereby forcibly driving the vibrator in an excitation manner. Thereafter, when the vibrator substantially attains its stationary state and thereby the charged voltage of a capacitor reaches a threshold value of an inverter, the first and second analog switches are turned off while the third analog switch is turned on. Accordingly, the output of a self-excitation circuit is supplied to the electrode of the vibrator so as to vibrate the vibrator in a self-excitation manner.