Patents by Inventor Yoshinori Shiode

Yoshinori Shiode has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Measuring method and apparatus, exposure method and apparatus using the same, and device manufacturing method
    Patent number: 7495742
    Abstract: A method for measuring an optical performance of a projection optical system in an exposure apparatus that exposes a pattern on a reticle onto a substrate includes the steps of determining an pupil area in the projection optical system, scanning a test reticle or a reference plate, imaging a test pattern on the test reticle or the reference plate onto a surface of the substrate via the pupil area in the projection optical system which has been determined by the determining step, and measuring a positional offset between a predetermined position and an image of the test pattern that has been imaged by the imaging step.
    Type: Grant
    Filed: December 15, 2004
    Date of Patent: February 24, 2009
    Assignee: Canon Kabushiki Kaisha
    Inventor: Yoshinori Shiode