Patents by Inventor Yoshinori TAWARATANI

Yoshinori TAWARATANI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate processing apparatus and substrate processing method
    Patent number: 10144033
    Abstract: A substrate is held and rotated in a horizontal attitude by a rotation holder. A coating liquid is supplied by a coating liquid supplier to a surface to be processed of the substrate rotated by the rotation holder. A first removal liquid is supplied by a first removal liquid supplier to a first annular region at a peripheral portion of the substrate rotated by the rotation holder before the coating liquid supplied by the coating liquid supplier loses fluidity. In this state, a supply position of the first removal liquid by the first removal liquid supplier is moved from an inner edge to an outer edge of the first annular region.
    Type: Grant
    Filed: August 30, 2016
    Date of Patent: December 4, 2018
    Assignee: SCREEN Holdings Co., Ltd.
    Inventors: Masanori Imamura, Masashi Kanaoka, Hidetoshi Sagawa, Yoshinori Tawaratani, Masaaki Furukawa
  • SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
    Publication number: 20170056917
    Abstract: A substrate is held and rotated in a horizontal attitude by a rotation holder. A coating liquid is supplied by a coating liquid supplier to a surface to be processed of the substrate rotated by the rotation holder. A first removal liquid is supplied by a first removal liquid supplier to a first annular region at a peripheral portion of the substrate rotated by the rotation holder before the coating liquid supplied by the coating liquid supplier loses fluidity. In this state, a supply position of the first removal liquid by the first removal liquid supplier is moved from an inner edge to an outer edge of the first annular region.
    Type: Application
    Filed: August 30, 2016
    Publication date: March 2, 2017
    Inventors: Masanori IMAMURA, Masashi KANAOKA, Hidetoshi SAGAWA, Yoshinori TAWARATANI, Masaaki FURUKAWA