Abstract: The present invention is a charged-particle gun (EG) in which a negative electrode (1) and a positive electrode (9) are integrated and assembled in advance, and which can be stored and transported in a state in which the negative electrode and the positive electrode are integrated, wherein the negative electrode and the positive electrode are connected by a conductor (11) during storage and transportation of the charged-particle gun. It is thereby possible to prevent an electrode tip of the charged-particle gun from being damaged by electrical discharge caused by static electricity during storage and transportation.

Abstract: The present invention is a charged-particle gun (EG) in which a negative electrode (1) and a positive electrode (9) are integrated and assembled in advance, and which can be stored and transported in a state in which the negative electrode and the positive electrode are integrated, wherein the negative electrode and the positive electrode are connected by a conductor (11) during storage and transportation of the charged-particle gun. It is thereby possible to prevent an electrode tip of the charged-particle gun from being damaged by electrical discharge caused by static electricity during storage and transportation.

Abstract: Provided is an electron source which outputs a stable electron beam even when vibration is applied from the external to an apparatus which uses the electron source. The electron source is provided with an insulator (5); two conductive terminals (4) arranged at an interval on the insulator (5); a long filament (3) stretched between the conductive terminals (4); and a needle-like cathode (1) having an electron emitting section attached to the filament (3). The vertical cross-section shape of the filament (3) in the axis direction has a long direction and a short direction, and the maximum length in the long direction is 1.5 times or more but not more than 5 times the maximum length in the short direction.

Abstract: An electron emitting source capable of preventing increase in an inter-terminal resistance and a manufacturing method of the electron emitting source. The electron emitting source comprises an electron emitting chip made of rare-earth hexaboride, and a heater constituted by a carbonaceous member for holding and heating the electron emitting chip, wherein an electrically conductive substance is provided in a gap between the electron emitting chip and the heater.

Abstract: Provided is an electron source which provides a stable electron beam even when vibration is applied from external to a device which uses the electron source. The electron source is provided with a needlelike chip (1) having an electron emitting section at one end; a cup-like component (6) bonded to the other end of the needlelike chip (1); and a filament (3) for heating the cup-like component (6). The filament (3) is arranged in a gap inside the cup-like component (6), in a noncontact state to the cup-like component (6).

Abstract: An electron source producing an electron beam which is highly reliable and stable even when it is externally oscillated. The electron source comprises a cathode (1) having an electron emitting section which is so connected to be interposed between top ends of two filaments (3) which are respectively connected to two conductive pins (4) provided on an insulator member (5), an end of the cathode (1) which differs from the electron emitting section being fixed to the insulator member (5), wherein the two filaments (3) are being twofold symmetry with a center on a center axis of the cathode (1), and preferably, the end of the cathode (1) which differs from the electron emitting section is fixed to the insulator member (5) via a metallic member (6) brazed to the insulator member, and more preferably, a curved portion is provided to the filaments.

Abstract: The present invention provides an electron source that can produce a stable electron beam even if an apparatus employing the electron source receives vibration from the outside. An electron source comprising an insulator, a pair of conductive terminals attached to the insulator, a filament tensed between the pair of conductive terminals, a rod-shaped cathode having a sharp end portion performing as an electron emitting portion and joined with the filament, wherein the cathode has another end portion different from the electron emitting portion, fixed to the insulator. It is preferred that said another end portion of the cathode other than the electron emitting portion, is fixed to the insulator via a metal pin brazed with the insulator.

Abstract: An electron gun includes an electron source configured to emit electrons. The electron source includes an electron emission region configured to emit the electrons and an electron emission restrictive region configured to restrict emission of the electrons. The electron emission restrictive region is located on a side surface of the electron source except an electron emission surface on a tip of the electron source and is covered with a different material from the electron source. The electron gun emits thermal field-emitted electrons by applying an electric field to the tip while maintaining a sufficiently low temperature to avoid sublimation of a material of the electron source. The material of the electron source may be lanthanum hexaboride (LaB6) or cerium hexaboride (CeB6). The electron emission restrictive region may be covered with carbon.

Abstract: An electron gun with a truncated-cone-shaped cathode with uniform emission current density is efficiently manufactured. A manufacturing method of a cathode electron gun equipped with a supply source for diffusing oxide of a metal element on a single crystal needle of tungsten or molybdenum includes steps of forming a truncated-cone-shape having a flat plane at a single crystal edge serving as the cathode by machining beforehand, thereafter thinning and removing a front layer of the flat plane by a focused gallium ion beam, and re-flattening it.

Abstract: An electron emitting source capable of preventing increase in an inter-terminal resistance and a manufacturing method of the electron emitting source. The electron emitting source comprises an electron emitting chip made of rare-earth hexaboride, and a heater constituted by a carbonaceous member for holding and heating the electron emitting chip, wherein an electrically conductive substance is provided in a gap between the electron emitting chip and the heater.

Abstract: Provided is an electron source which outputs a stable electron beam even when vibration is applied from the external to an apparatus which uses the electron source. The electron source is provided with an insulator (5); two conductive terminals (4) arranged at an interval on the insulator (5); a long filament (3) stretched between the conductive terminals (4); and a needle-like cathode (1) having an electron emitting section attached to the filament (3). The vertical cross-section shape of the filament (3) in the axis direction has a long direction and a short direction, and the maximum length in the long direction is 1.5 times or more but not more than 5 times the maximum length in the short direction.

Abstract: An electron source producing an electron beam which is highly reliable and stable even when it is externally oscillated. The electron source comprises a cathode (1) having an electron emitting section which is so connected to be interposed between top ends of two filaments (3) which are respectively connected to two conductive pins (4) provided on an insulator member (5), an end of the cathode (1) which differs from the electron emitting section being fixed to the insulator member (5), wherein the two filaments (3) are being twofold symmetry with a center on a center axis of the cathode (1), and preferably, the end of the cathode (1) which differs from the electron emitting section is fixed to the insulator member (5) via a metallic member (6) brazed to the insulator member, and more preferably, a curved portion is provided to the filaments.

Abstract: An electron source excellent in the uniformity in current emission distribution is provided certainly and at a low cost. A process for producing an electron source having an electron emitting portion at one end of a rod, which comprises a step of forming the electron emitting portion by machining, and a step of removing a damaged layer at the surface of the formed electron emitting portion by chemical polishing or electrolytic polishing.

Abstract: Provided is an electron source which provides a stable electron beam even when vibration is applied from external to a device which uses the electron source. The electron source is provided with a needlelike chip (1) having an electron emitting section at one end; a cup-like component (6) bonded to the other end of the needlelike chip (1); and a filament (3) for heating the cup-like component (6). The filament (3) is arranged in a gap inside the cup-like component (6), in a noncontact state to the cup-like component (6).

Abstract: An electron source showing little surplus current even at a time of high angular intensity operation is provided. An electron source comprising an electron emitting portion, a suppressor electrode and an extractor electrode, wherein the electron emitting portion is present at a leading edge of an end of a single crystal rod having a shape comprising a first truncated cone portion or a cone portion, and a second truncated cone portion continuing therefrom. It is preferably the electron source, wherein the single crystal rod has an oxide of a metal element selected from the group consisting of Ca, Sr, Ba, Sc, Y, La, Ti, Zr, Hf and lanthanoide elements as a diffusion source, and the single crystal rod is made of tungsten or molybden of <100> orientation.

Abstract: The present invention provides an electron source that can produce a stable electron beam even if an apparatus employing the electron source receives vibration from the outside. An electron source comprising an insulator, a pair of conductive terminals attached to the insulator, a filament tensed between the pair of conductive terminals, a rod-shaped cathode having a sharp end portion performing as an electron emitting portion and joined with the filament, wherein the cathode has another end portion different from the electron emitting portion, fixed to the insulator. It is preferred that said another end portion of the cathode other than the electron emitting portion, is fixed to the insulator via a metal pin brazed with the insulator.

Abstract: To provide an electron source to be used for a surface analyzer such as a scanning or transmission electron microscope or an Auger electron spectroscope, or an electron beam lithography machine, particularly for a semiconductor wafer inspection apparatus such as a scanning electron microscope to be used at a low acceleration with an electron beam acceleration voltage of up to 1 kV, CD SEM or DR SEM. An electron source wherein a barium supplying source consisting of a complex oxide comprising barium oxide and an oxide of metal other than barium, is provided at a portion of a single crystal needle of tungsten or molybdenum.

Abstract: An electron source excellent in the uniformity in current emission distribution is provided certainly and at a low cost A process for producing an electron source having an electron emitting portion at one end of a rod which comprises a step of forming the electron emitting portion by machining, and a step of removing a damaged layer at the surface of the formed electron emitting portion by chemical polishing or electrolytic polishing.

Abstract: An electron gun includes an electron source configured to emit electrons. The electron source includes an electron emission region configured to emit the electrons and an electron emission restrictive region configured to restrict emission of the electrons. The electron emission restrictive region is located on a side surface of the electron source except an electron emission surface on a tip of the electron source and is covered with a different material from the electron source. The electron gun emits thermal field-emitted electrons by applying an electric field to the tip while maintaining a sufficiently low temperature to avoid sublimation of a material of the electron source. The material of the electron source may be lanthanum hexaboride (LaB6) or cerium hexaboride (CeB6). The electron emission restrictive region may be covered with carbon.

Abstract: To provide an electron source which is suitable for an electron beam lithography machine, an Auger electron spectroscope or the like and provides a small total emission current even in a high angular intensity operation. An electron gun provided with a cathode which comprises a single crystal needle of tungsten or molybdenum and a coating layer consisting of oxygen and at least one metal element selected from the group consisting of Group 2A, Group 3A and Group 4A, formed on its surface, characterized in that an apex of the cathode as a truncated cone shape, and the truncated cone shape portion has a cone angle of from 25° to 95° and a diameter of the top surface of from 5 ?m to 200 ?m.