Patents by Inventor Yoshinoru Kumura

Yoshinoru Kumura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Hardmask with high selectivity for Ir barriers for ferroelectric capacitor manufacturing
    Patent number: 7045837
    Abstract: The present invention provides a ferroelectric device relatively free of fences by using a hardmask having high etching selectivity relative to an underlying barrier layer. The present invention also includes a method for suppressing the fences clinging to the sidewalls of ferroelectric devices. Additionally, the present invention provides a ferroelectric device having a hardmask relatively thin compared to an underlying barrier layer when compared to prior art devices.
    Type: Grant
    Filed: January 31, 2003
    Date of Patent: May 16, 2006
    Assignees: Infineon Technologies AG, Kabushiki Kaisha Toshiba
    Inventors: Ulrich Egger, Haoren Zhuang, Yoshinoru Kumura, Kazuhiro Tomioka, Hiroyuki Kanaya