Abstract: For a semiconductor device S as an inspected object, there are provided an image acquisition part 1, an optical system 2 including an objective lens 20, and a solid immersion lens (SIL) 3 movable between an insertion position including an optical axis from the semiconductor device S to the objective lens 20 and a standby position off the optical axis. Then observation is carried out in two control modes consisting of a first mode in which the SIL 3 is located at the standby position and in which focusing and aberration correction are carried out based on a refractive index n0 and a thickness t0 of a substrate of the semiconductor device S, and a second mode in which the SIL 3 is located at the insertion position and in which focusing and aberration correction are carried out based on the refractive index n0 and thickness t0 of the substrate, and a refractive index n1, a thickness d1, and a radius of curvature R1 of SIL 3.

Abstract: A solid immersion lens holder 8A is provided with a base part 50 attached to an objective lens 21, and a lens holding part 60 provided with the base part 50, extending in a direction of optical axis L of the objective lens 21, and arranged to hold a solid immersion lens 6 at an end portion thereof. The lens holding part holds the solid immersion lens so that light emerging from the solid immersion lens to the base part side travels through a region outside the lens holding part and toward the base part, and the base part has a light passing portion 53 which transmits the light toward the objective lens. Since the lens holding part extends in the direction of the optical axis L of the objective lens, even in a case where an observation object 11 is observed as located on a bottom surface of recess 13, the lens holding part will be prevented from contacting a side wall 13a of the recess.

Abstract: For a semiconductor device S as an inspected object, there are provided an image acquisition part 1, an optical system 2 including an objective lens 20, and a solid immersion lens (SIL) 3 movable between an insertion position including an optical axis from the semiconductor device S to the objective lens 20 and a standby position off the optical axis. Then observation is carried out in two control modes consisting of a first mode in which the SIL 3 is located at the standby position and in which focusing and aberration correction are carried out based on a refractive index n0 and a thickness t0 of a substrate of the semiconductor device S, and a second mode in which the SIL 3 is located at the insertion position and in which focusing and aberration correction are carried out based on the refractive index n0 and thickness t0 of the substrate, and a refractive index n1, a thickness d1, and a radius of curvature R1 of SIL 3.

Abstract: For a semiconductor device S as an inspected object, there are provided an image acquisition part 1, an optical system 2 including an objective lens 20, and a solid immersion lens (SIL) 3 movable between an insertion position including an optical axis from the semiconductor device S to the objective lens 20 and a standby position off the optical axis. Then observation is carried out in two control modes consisting of a first mode in which the SIL 3 is located at the standby position and in which focusing and aberration correction are carried out based on a refractive index n0 and a thickness t0 of a substrate of the semiconductor device S, and a second mode in which the SIL 3 is located at the insertion position and in which focusing and aberration correction are carried out based on the refractive index n0 and thickness t0 of the substrate, and a refractive index n1, a thickness d1, and a radius of curvature R1 of SIL 3.

Abstract: A solid immersion lens holder 8A is provided with a base part 50 attached to an objective lens 21, and a lens holding part 60 provided with the base part 50, extending in a direction of optical axis L of the objective lens 21, and arranged to hold a solid immersion lens 6 at an end portion thereof. The lens holding part holds the solid immersion lens so that light emerging from the solid immersion lens to the base part side travels through a region outside the lens holding part and toward the base part, and the base part has a light passing portion 53 which transmits the light toward the objective lens. Since the lens holding part extends in the direction of the optical axis L of the objective lens, even in a case where an observation object 11 is observed as located on a bottom surface of recess 13, the lens holding part will be prevented from contacting a side wall 13a of the recess.

Abstract: For a semiconductor device S as an inspected object, there are provided an image acquisition part 1, an optical system 2 including an objective lens 20, and a solid immersion lens (SIL) 3 movable between an insertion position including an optical axis from the semiconductor device S to the objective lens 20 and a standby position off the optical axis. Then observation is carried out in two control modes consisting of a first mode in which the SIL 3 is located at the standby position and in which focusing and aberration correction are carried out based on a refractive index n0 and a thickness t0 of a substrate of the semiconductor device S, and a second mode in which the SIL 3 is located at the insertion position and in which focusing and aberration correction are carried out based on the refractive index n0 and thickness t0 of the substrate, and a refractive index n1, a thickness d1, and a radius of curvature R1 of SIL 3.

Abstract: In a wavelength-variable light outputting apparatus, a diffraction grating 8 and a shielding member 11 which make wavelength and light quantity variable are attached to galvanometric scanners 12, 13, respectively, and the latter are swung, whereby the wavelength can be made variable at a high speed while in a state where the light quantity is kept constant. Such an apparatus is useful for capturing a fluorescent image of a biological sample in particular. By way of the shielding member 11, light is made incident on the optical fiber 10 and is outputted therefrom, whereby a biological sample SM can effectively be irradiated with light.

Abstract: A preparation or a pet food comprising an edible carboxylic acid, edible hydroxycarboxylic acid such as fumaric acid or a salt thereof is administered or fed to a pet. The content of the edible organic acid or a salt thereof is, in terms of the edible organic acid, about 0.1 to 99.9% by weight for the preparation such as a solid preparation and about 0.01 to 10% by weight for the pet food such as a dry food. The dose of the edible organic acid or a salt thereof is, in terms of the edible organic acid, about 5 to 500 mg/day/kg of body weight. The preparation and pet food have an improved palatability and safety in comparison with a conventional urine-acidifying agent, thus the administration or feeding of said preparation or pet food prevent or treat urinary calculosis in a pet even in a small amount.

Abstract: A feed composition containing fumaric acid or a salt thereof, a concentrate feed and, if necessary, a roughage is fed to ruminants. The ratio of the concentrate to the roughage is about 90-10/10-90 (% by weight). When fumaric acid or a salt thereof in a granular form such as mean particle diameter of not less than 75 mesh is added to a ration, the proportion of acetic acid and propionic acid among volatile fatty acids (VFA) in the ruminant animal is increased for a sustained time to enhance the efficiency of milk and meat production and improve the quality of meat. The proportion of fumaric acid or a salt thereof is about 0.1 to 10% by weight. The addition of fumaric acid or a salt thereof helps to suppress flatulence which tends to occur on feeding with concentrates.

Abstract: A device for mounting a terminal to an electric indicator includes a meter body of the electrical indicator including electric wiring connected to the electrical terminal and a through hole, a gauge support plate of the electric indicator made of electrically insulating material and disposed on the meter body, and the gauge support plate having at least one concavity to which the electrical terminal is mounted, a screw, which is inserted from beneath the meter body via the through hole, for fastening the terminal to the gauge support plate, and a mechanism for preventing an occurrence of a deformation and deviation in said gauge support plate by the fastening of the screw. The mechanism includes a terminal holder for receiving the electrical terminal therein and supporting members for suspensionally supporting the terminal holder, or a pointed pin provided on the meter body and a notch provided in the terminal which is in engagement with the pin.