Abstract: In order to prevent an erroneous determination of an on-film defect, the sensitivity of the post-inspection is reduced so that a film swelling due to a minute defect would not be detected. Classification is performed to determine whether a defect is at least one of an on-film defect and a film swelling, by performing a coordinate correction on the result of a post-inspection by an actual-defect fine alignment using the result of a pre-inspection performed with two-stage thresholds, and by checking defects against each other. In addition, classification is performed to determine whether a defect is at least one of an on-film defect and a film swelling by, during the post-inspection, preparing instruction data from information of the refractive index and thickness of a film formed on a wafer and comparing the instruction data with a signal intensity ratio of a detection system.

Abstract: The present invention addresses the problem of a film formation process in that a minute defect that an inspection before film formation (pre-inspection) has failed to detect becomes a larger film swelling due to film formation, and that, since the film swelling cannot be distinguished from an on-film defect, the film swelling is detected during an inspection after the film formation (post-inspection) as being an on-film defect that is on the film. In order to prevent the erroneous determination of the on-film defect, the sensitivity of the post-inspection has been reduced so that a film swelling due to a minute defect would not be detected.

Abstract: Proposed is an inspection device that is provided with: an illuminating optical unit that irradiates a discretionary region of a sample with light; a control unit that gives instructions to the illuminating optical unit; and at least one detection unit that detects light transmitted from the sample. The illuminating optical unit includes a light source unit that generates light, and an electrooptic element unit to which the light generated by the light source unit is inputted, and on the basis of the instructions given from the control unit, the electrooptic element unit adjusts the light to be in a desired polarization state, said light having been generated by the light source unit, and irradiates the sample with the light.

Abstract: A variable displacement type swash plate compressor includes a housing having therein a suction chamber, a discharge chamber, a control pressure chamber, a shaft hole, and cylinder bores. The compressor further has a drive shaft, a swash plate, an inclination angle changing mechanism, pistons, introduction passages, and a valve mechanism. The valve mechanism includes a valve element is disposed in a passage connecting the control pressure chamber and the suction chamber. The valve element is integrally rotatable with the drive shaft and axially movable by a pressure difference across the valve element. An opening of the residual gas bypass passage is changed by the axial movement of the valve element. The valve element selectively connects and disconnects the introduction passages with the residual gas bypass passage.

Abstract: Proposed is an inspection device that is provided with: an illuminating optical unit that irradiates a discretionary region of a sample with light; a control unit that gives instructions to the illuminating optical unit; and at least one detection unit that detects light transmitted from the sample. The illuminating optical unit includes a light source unit that generates light, and an electrooptic element unit to which the light generated by the light source unit is inputted, and on the basis of the instructions given from the control unit, the electrooptic element unit adjusts the light to be in a desired polarization state, said light having been generated by the light source unit, and irradiates the sample with the light.

Abstract: A swash plate type variable displacement compressor includes a collection and supply mechanism. The collection and supply mechanism has collection passages, supply passages, an annular space, an inlet port, and an outlet port. The inlet port is communicable with a working collection passage of the collection passages. The outlet port is communicable with a working supply passage of the supply passages. When the inclination angle of the swash plate is maximum, residual refrigerant gas in a compression chamber of collection phase is collected through the working collection passage and the collected refrigerant gas is supplied to a compression chamber of supply phase. On the other hand, when the inclination angle is less than the maximum, residual refrigerant gas is supplied no more into the supply-phase compression chamber.

Abstract: A variable displacement type swash plate compressor includes a housing having therein a suction chamber, a discharge chamber, a control pressure chamber, a shaft hole, and cylinder bores. The compressor further has a drive shaft, a swash plate, an inclination angle changing mechanism, pistons, introduction passages, and a valve mechanism. The valve mechanism includes a valve element is disposed in a passage connecting the control pressure chamber and the suction chamber. The valve element is integrally rotatable with the drive shaft and axially movable by a pressure difference across the valve element. An opening of the residual gas bypass passage is changed by the axial movement of the valve element. The valve element selectively connects and disconnects the introduction passages with the residual gas bypass passage.

Abstract: A compressor has suction reed valves each of which includes a fixation portion fixed to the valve base plate, a basal portion that extends from the fixation portion and is separable from the plate, and a valve flap extending from the basal portion toward the distal end to selectively open and close the suction port. Each suction port has a shape elongated in the width direction, which is orthogonal to the longitudinal direction. The width of the basal portion is greater than that of the suction port. Each valve flap includes an opening-closing portion facing the corresponding suction port and stoppers, which project from the ends in the width direction. The side edges in the width direction are continuous from the stoppers to the basal portion to gradually approach the suction port. The cylinder block has pairs of recessed retainers. The stoppers contact the retainers.

Abstract: A piston-type compressor includes a housing, a drive shaft supported on the housing, a communication hole formed inside the drive shaft, a valve mechanism, and a cylindrical body. The cylindrical body is inserted in the communication hole to disconnect a residual gas bypass passage and the communication hole from each other and to open the interior space of the cylindrical body to the communication hole. The valve mechanism includes an annular space defined outside the cylindrical body in the communication hole and multiple connection holes providing communication between the annular space and communication passages. The residual gas bypass passage is formed of the annular space and the multiple connection holes.

Abstract: A compressor includes a valve base plate, which is arranged between a suction chamber and a compression chamber and has a suction port. The valve base plate includes a sealing surface, a recessed groove, a receiving surface, and a support surface. The sealing surface is flush with a fixing surface and contacts the valve portion in an annular manner. The recessed groove is located at an outer side of the sealing surface and recessed with respect to the fixing surface. The recessed groove includes a bottom portion and separates an edge portion of the valve portion from the bottom portion. The receiving surface is flush with the fixing surface and capable of contacting a distal zone of the valve portion. The support surface is flush with the fixing surface and capable of contacting a middle zone located at an inner side of the sealing surface of the valve portion.

Abstract: A differential pressure control valve has a valve seat made of magnetic material, a valve body, and a guiding member fixed to the valve seat to guide the valve body. The valve body is located on the downstream side of the valve seat, and is seatable on the valve seat in accordance with the pressure difference between the upstream side and the downstream side to selectively open and close a valve hole. The valve body has a lid made of magnetic material and a guided member made of nonmagnetic material. The lid is seated on the valve seat to close the valve hole, and the guided member is guided by the guiding member. The valve seat or the lid has a permanent magnet, located outside the area where the valve body is seated on the valve seat, urging the valve body in the direction approaching the valve seat.

Abstract: A swash plate type variable displacement compressor includes a collection and supply mechanism. The collection and supply mechanism has collection passages, supply passages, an annular space, an inlet port, and an outlet port. The inlet port is communicable with a working collection passage of the collection passages. The outlet port is communicable with a working supply passage of the supply passages. When the inclination angle of the swash plate is maximum, residual refrigerant gas in a compression chamber of collection phase is collected through the working collection passage and the collected refrigerant gas is supplied to a compression chamber of supply phase. On the other hand, when the inclination angle is less than the maximum, residual refrigerant gas is supplied no more into the supply-phase compression chamber.

Abstract: The present invention provides a variable displacement swash plate type compressor that reduces wear of cylinder bores and the amount of blow-by gas. Each piston of the compressor has a piston main body, which has a distal portion located at an end corresponding to the compression chamber. A tapering portion and an arcuate portion are formed in the distal portion. The arcuate portion is continuous with an end of the tapering portion that is closer to the compression chamber. The tapering portion and the arcuate portion each have a diameter that increases toward the skirt. The tapering portion has a tapering angle that is in a range from 0.45 degrees to 1.5 degrees. The distance between the distal end of the piston main body and a starting point of the tapering portion on an end closer to the skirt is set in a range from 1.5 mm to 5.0 mm.

Abstract: A piston-type compressor includes a housing, a drive shaft supported on the housing, a communication hole formed inside the drive shaft, a valve mechanism, and a cylindrical body. The cylindrical body is inserted in the communication hole to disconnect a residual gas bypass passage and the communication hole from each other and to open the interior space of the cylindrical body to the communication hole. The valve mechanism includes an annular space defined outside the cylindrical body in the communication hole and multiple connection holes providing communication between the annular space and communication passages. The residual gas bypass passage is formed of the annular space and the multiple connection holes.

Abstract: A compressor includes a housing, a compression mechanism, an input shaft rotatable on an axis thereof, an output shaft for driving the compression mechanism, a transmission for transmitting torque from the input shaft to the output shaft and also changing the rotating speed of the input shaft and a control device for controlling the operation of the transmission. The transmission includes a plurality of planetary rollers, a carrier rotatably supporting the respective planetary rollers and being integrally rotatable with the input shaft, a sun roller engaged with the respective planetary rollers and integrally rotatable with the output shaft and a ring roller engaged with the respective planetary rollers. The ring roller can be fixed to the housing or rotatable relative to the housing.

Abstract: A compressor has suction reed valves each of which includes a fixation portion fixed to the valve base plate, a basal portion that extends from the fixation portion and is separable from the plate, and a valve flap extending from the basal portion toward the distal end to selectively open and close the suction port. Each suction port has a shape elongated in the width direction, which is orthogonal to the longitudinal direction. The width of the basal portion is greater than that of the suction port. Each valve flap includes an opening-closing portion facing the corresponding suction port and stoppers, which project from the ends in the width direction. The side edges in the width direction are continuous from the stoppers to the basal portion to gradually approach the suction port. The cylinder block has pairs of recessed retainers. The stoppers contact the retainers.

Abstract: A compressor includes a housing, a compression mechanism, an input shaft rotatable on an axis thereof, an output shaft for driving the compression mechanism, a transmission for transmitting torque from the input shaft to the output shaft and changing the speed of the input shaft and a control device. The transmission is a planetary roller train and includes a plurality of planetary rollers, a carrier, a sun roller and a ring roller. The ring roller includes a first ring engaging the respective planetary rollers and a second ring supporting a one-way clutch. The ring roller can be movable relative to the housing in the direction parallel to the axis. The first ring and the second ring are connected so that the first ring can be displaced in a radial direction, integrally rotatable with the second ring and movable with the second ring in the direction parallel to the axis.

Abstract: A swash plate compressor capable of realizing an excellent sliding characteristic when a drive shaft is rotated at high speed, and a high refrigerating capacity when the drive shaft is rotated at low speed, has a release passage for communication between a crank chamber and a suction chamber. The release passage includes a first passage communicated to an oil rich region, in the crank chamber, and a second passage communicated to an oil poor region, in which lubricating oil is small in quantity, in the crank chamber. A valve mechanism that increases an opening ratio of the first passage with respect to the release passage, as a rotational speed of a drive shaft increases, and increases an opening ratio of the second passage with respect to the release passage, as the rotational speed of the drive shaft decreases.

Abstract: A housing has a peripheral wall that surrounds a crank chamber. The peripheral wall has a valve chamber that is recessed radially inward from an outer surface of the peripheral wall with respect to the axis. A bimetal member, which deforms in correspondence with the temperature in the crank chamber, is arranged in the valve chamber. A valve body, which is supported by the bimetal member, is arranged in the valve chamber. The peripheral wall has a first oil discharge passage and allows communication between the crank chamber and the valve chamber, and a second oil discharge passage through which the valve chamber and a suction chamber communicate with each other. When the temperature in the crank chamber exceeds a predetermined value and deforms the bimetal member to move the valve body, communication between the first and second oil discharge passage is permitted through the valve chamber.

Abstract: A compressor with a transmission includes a clutch that varies the rotational speed of an output shaft between two different speeds. The clutch includes a friction layer, which secures a ring roller by movement of the ring roller in a first direction (securing direction), a first control chamber, a first control piston accommodated in the first control chamber and movable in the direction of an input shaft axis, a first thrust bearing between the first control piston and the ring roller, a second control chamber facing the first control chamber, a second control piston accommodated in the second control chamber and movable in the direction of the axis), a second thrust bearing between the second control piston and the ring roller, and a pressure control mechanism, which controls a first control pressure supplied to the first control chamber and a second control pressure supplied to the second control chamber.