Abstract: There is disclosed a method for X-ray topography wherein an X-ray topographic image is obtained for an unprocessed single crystal ingot as it is after being produced by Czochralski method to observe crystal dislocations, thereby finding a boundary between a dislocation-appearing area and a dislocation-disappearing area. A scanning stage (34) travels along a direction X to position the observation area of the silicon ingot (22) at the X-ray irradiation site. The silicon ingot (22) is .phi.-rotated on its axis so that the predetermined crystal lattice plane erects vertically. A traveling table (46) travels along a direction Y to align the rotation center (49) of an .omega.-rotation table (48) with the peripheral surface of the ingot (22). The .omega.-rotation and .phi.-rotation are precisely adjusted while observing diffracted X-rays with an X-ray television camera (26). Then, an X-ray recording medium (66) is mounted on the scanning stage (34).