Abstract: An optical interferometric measuring instrument comprises a laser light source 12, an interferometer portion 14, a reflecting mirror 20, a bellows driving carriage 30, and a fixed portion 34. The bellows driving carriage 30 moves together with a slider 16. A main bellows 36 is disposed between the bellows driving carriage 30 and the fixed portion 34. An auxiliary bellows 38 is disposed between the reflecting mirror 20 and the bellows driving carriage 30. An auxiliary bellows 40 is disposed between the interferometer portion 14 and the fixed portion 34. It is possible to avoid the variation of the laser wavelength ascribable to the change of the refractive index of air when the laser light passes through the air.

Abstract: To provide a surface profile measurement apparatus capable of efficient measurement of the surface profile of an object. A diamond indenter (16) is movably mounted. The tip end of the diamond indenter (16) is irradiated by light, and the light reflected by the tip end (17) is condensed through a lens (46). The condensed light is observed by a photo sensor (42) for measurement of the curvature radius of the tip end (17). Meanwhile, the light reflected by the tip end (17) and the light reflected by a reference body (66) together cause an interference fringe. The interference fringe is observed by a CCD camera (44) to measure the surface profile of tip end (17).

Abstract: To provide a surface profile measurement apparatus capable of efficient measurement of the surface profile of an object. A diamond indenter (16) is movably mounted. The tip end of the diamond indenter (16) is irradiated by light, and the light reflected by the tip end (17) is condensed through a lens (46). The condensed light is observed by a photo sensor (42) for measurement of the curvature radius of the tip end (17). Meanwhile, the light reflected by the tip end (17) and the light reflected by a reference body (66) together cause an interference fringe. The interference fringe is observed by a CCD camera (44) to measure the surface profile of tip end (17).

Abstract: A body 1 placed thereon with a table 35 put thereon with an object to be measured W, and a portal frame 41 supporting both ends of rail 43 to the body through pillars 42A and 42B, the rail being placed above the table 35 and extending along a moving direction of a pair of probes 91A and 91B, are provided. A pair of sliders 51A and 51B are movably supported by the rail 43. The pair of the probes is extended downward from the sliders 51A and 51B to be abutted to the object W put on the table 35. The flexural deformation of the probes 91A and 91B is decreased due to the shorter length of the probes 91A and 91B, so that the high accurate measurement is achieved and a relative measurement is omitted.

Abstract: A body 1 placed thereon with a table 35 put thereon with an object to be measured W, and a portal frame 41 supporting both ends of rail 43 to the body through pillars 42A and 42B, the rail being placed above the table 35 and extending along a moving direction of a pair of probes 91A and 91B, are provided. A pair of sliders 51A and 51B are movably supported by the rail 43. The pair of the probes are extended downward from the sliders 51A and 51B to be abutted to the object W put on the table 35. The flexural deformation of the probes 91A and 91B is decreased due to the shorter length of the probes 91A and 91B, so that the high accurate measurement is achieved and a relative measurement is omitted.