Abstract: A plurality of excitation elements, each including an IDT and a piezoelectric film, for exciting, respectively, surface acoustic waves, each having a unique center frequency, are formed on one end of a non-piezoelectric substrate, a plurality of receiving elements, each including an IDT and a piezoelectric film, for receiving, respectively, surface acoustic waves, each having a unique center frequency, are formed on the other end of the non-piezoelectric substrate to face the excitation elements, respectively, the center frequencies of the IDTs of the facing excitation element and receiving element are equal, the center frequencies of the IDTs of the excitation elements next to each other are different, and surface acoustic waves are propagated across the non-piezoelectric substrate, between the facing excitation elements and receiving elements so as to detect the position of an object in contact with the non-piezoelectric substrate, based on received results in the receiving elements.

Abstract: A surface acoustic wave filter including a piezoelectric substrate, an exciting electrode formed on the piezoelectric substrate and exciting a surface acoustic wave, and a receiving electrode receiving the surface acoustic wave. Both the exciting and receiving electrodes are provided with interdigital electrode fingers having a period p. One of the exciting and receiving electrodes is constructed of a plurality of interdigital electrode sub-units having substantially the same electrode surface areas occupied by interdigital electrode fingers. The interdigital electrode sub-units are disposed in a direction perpendicular to a propagation direction of the excited surface acoustic wave and have a positional relation such that the interdigital electrode sub-units are offset from each other by (n±¼)p, wherein n is an integer, in a direction parallel to the propagation direction of the surface acoustic wave.

Abstract: A film bulk acoustic resonator is fabricated in the following manner. First, a base layer is formed on an insulating substrate. Then, a resonator assembly is formed on the base layer. The resonator assembly includes a first electrode held in contact with the base layer, a second electrode, and a piezoelectric layer held between the first and the second electrodes. Then, a resist layer is formed to cover the resonator assembly and the base layer. Then, a through-hole is formed in the resist layer so that the base layer is exposed via the through-hole. Then, etchant is supplied via the through-hole to make a space in the base layer under the resonator assembly. Finally, the resist layer is removed.

Abstract: A duplexer device of this invention includes two surface acoustic wave filters having different band center frequencies and a phase matching circuit for matching phases of the two surface acoustic wave filters. The phase matching circuit is composed of one or more. line patterns, and at least one of the line patterns is formed as divided among a plurality of internal layers of a multi-layer package, and at least the line patterns formed on the internal layers adjacent to each other have pattern shapes different from each other. According to the invention, a duplexer device having a small size and stable filter characteristics can be provided.

Abstract: A tuning-fork vibratory gyro has first and second arms and a base integrally connected to the first and second arms. The gyro includes drive electrodes used to generate tuning-fork vibrations due to a piezoelectric transversal effect, and detection electrodes provided on the first and second arms and used to output a detection voltage due to an angular velocity.

Abstract: Surface acoustic waves are excited in two diagonal directions from each of IDTs (excitation elements) disposed on the upper side and the lower side of a non-piezoelectric substrate, and the surface acoustic waves propagated on a detection region are received by IDTs (receiving elements) disposed on the left side and right side of the non-piezoelectric substrate so that a position of an object touching the non-piezoelectric substrate is detected based on the reception results. In each IDT, comb-like electrode fingers are joined to two facing electrode bases (signal electrode and ground electrode) in such a manner that the comb-like electrode fingers are inclined from a facing direction of the electrode bases.

Abstract: A touch panel device includes a plurality of input IDTs for exciting surface acoustic waves and a plurality of output IDTs for receiving the surface acoustic waves, corresponding to a plurality of tracks on a non-piezoelectric substrate, and each input IDT has a wideband electrode structure and each output IDT has a matched filter structure for outputting a large output upon receipt of a specific binary signal sequence. A signal obtained by arranging a plurality of specific signal sequences in time series is applied to each input IDT.

Abstract: A method of manufacturing a surface acoustic device having an electrode containing an Al and an other metal comprising; forming patterning a layer of an Al and other metal forming the electrode by reactive ion etching which is conducted by using an etching gas containing a mixed gas comprising Cl2 and He at a gas pressure of 0.1 Pa to 3 Pa.

Abstract: A surface acoustic wave device includes a substrate at least a surface of which has a piezoelectric function, and an electrode formed on the substrate, wherein the electrode is composed of a first film of Al containing Cu at or over a solid solubility limit of Cu to Al and one or more unit(s) of a second film of Al containing Mg at or over a Solid solubility limit of Mg to Al and a third film of Al containing Cu at or over the solid solubility limit of Cu to Al formed on the first film in this order, and the first film and the third film contain Mg diffused from the second film.

Abstract: An antenna duplexer including two duplexer elements each including two surface acoustic wave filters having different center pass band frequencies and connecting terminals for connecting the duplexer elements and external circuits, which are grouped into an antenna terminal group for connection to an external antenna, a receiving terminal group for connection to an external circuit and a transmitting terminal group for connection to an external circuit, wherein regions for disposing the antenna terminal group, the receiving terminal group and the transmitting terminal group are separated planarly.

Abstract: A tuning fork type vibrator including two arms and a base is supported by a supporting substrate mounted on a stem, and an oscillation limiting member formed from a ring-shaped rubber-like elastic body is mounted with its one face secured to the stem so as to surround the base. When an external vibration or impact is applied, the tuning fork type vibrator oscillates in response to the vibration or impact, but the oscillation range of the tuning fork type vibrator is limited by the presence of this oscillation limiting member, and thus bumping of the tuning fork type vibrator against the surrounding members such as the stem is prevented. Moreover, a gyro characteristic is not impaired, and a loss of the gyro function due to a stop of drive vibration does not occur.

Abstract: A surface acoustic wave reflector includes a piezoelectric substrate and a plurality of perturbation members arranged at a first period on the piezoelectric substrate. A plurality of free-surface regions where no perturbation members exist are formed in an arrangement of the perturbation members.

Abstract: The shape of drive electrodes and/or the shape of detection electrodes of a tuning fork type vibration gyro are made asymmetrical between the inside and outside of the arm, and between the surface and reverse face of the arm, to reduce the abnormal vibration and leaking output. The drive electrodes to be provided on the inside parts of the surface and reverse face of the first arm are formed smaller than the drive electrodes to be provided on the outside parts of the surface and reverse face thereof. The length of the detection electrode to be provided on the outside lateral face of the second arm is formed short. The drive electrodes to be provided on the surface and reverse face of the first arm are extended to the base side from the boundary position between the first arm and the base, and the detection electrodes to be provided on the surface and reverse face of the second arm are extended to the base side from the boundary position between the second arm and the base.

Abstract: A surface acoustic wave filter includes a piezoelectric substrate, an exciting electrode formed on the piezoelectric substrate and exciting a surface acoustic wave, and a receiving electrode receiving the surface acoustic wave. Both the exciting and receiving electrodes are provided with interdigital electrode fingers having a period p. Either one of the exciting and receiving electrodes is constructed of a plurality of interdigital electrode sub-units having substantially the same electrode surface areas occupied by interdigital electrode fingers. The interdigital electrode sub-units are disposed in a direction perpendicular to a propagation direction of the excited surface acoustic wave and have a positional relation such that the interdigital electrode sub-units are offset to each other by (n±¼)p, wherein n is an integer, in a direction parallel to the propagation direction of the surface acoustic wave.

Abstract: A duplexer device of this invention includes two surface acoustic wave filters having different band center frequencies and a phase matching circuit for matching phases of the two surface acoustic wave filters. The phase matching circuit is composed of one or more line patterns, and at least one of the line patterns is formed as divided among a plurality of internal layers of a multi-layer package, and at least the line patterns formed on the internal layers adjacent to each other have pattern shapes different from each other. According to the invention, a duplexer device having a small size and stable filter characteristics can be provided.

Abstract: A tuning-fork vibratory gyro has first and second arms and a base integrally connected to the first and second arms. The gyro includes drive electrodes used to generate tuning-fork vibrations due to a piezoelectric transversal effect, and detection electrodes provided on the first and second arms and used to output a detection voltage due to an angular velocity.

Abstract: In A surface acoustic wave filter constituted with a ladder of resonators having a resonance frequency or an anti-resonance frequency, an input current flowing into a resonator in a parallel arm at the first stage from the input is so large as to deteriorate its lifetime caused from a heat generation by the resistance of the thin film wiring. As a measure to this problem, bonding wires (30, 31) connected onto points on connection electrodes (130, 131) for connecting an end of each of plural comb teeth electrodes 111 forming the resonators Rs1 & Rp1, or on a lead conductor (103-1) extended longitudinally from the connection electrode, are allotted at both sides of a center line (C1) of the plural comb teeth electrode group. Furthermore, a bonding wire may be connected substantially onto the center line C1 as well. It is preferable for the bonding wires to be located substantially symmetric with respect to the center line C1.

Abstract: A SAW filter includes a first SAW resonator having a pair of terminals and a predetermined resonance frequency (frp), the first SAW resonator being provided in a parallel arm of the SAW filter. A second SAW resonator has a pair of terminals and a predetermined resonance frequency (frs) approximately equal to a predetermined antiresonance frequency of the first SAW resonator (fap). The second SAW resonator is provided in a series arm of the SAW filter. An inductance element is connected in series to the first SAW resonator.

Abstract: A SAW filter includes a first SAW resonator having a pair of terminals and a predetermined resonance frequency (frp), the first SAW resonator being provided in a parallel arm of the SAW filter. A second SAW resonator has a pair of terminals and a predetermined resonance frequency (frs) approximately equal to a predetermined antiresonance frequency of the first SAW resonator (fap). The second SAW resonator is provided in a series arm of the SAW filter. An inductance element is connected in series to the first SAW resonator.

Abstract: This invention relates to a surface acoustic wave device and a production process thereof. An electrode is formed by alternately laminating a film of an aluminum alloy containing at least copper added thereto and a copper film on a piezoelectric substrate. While the particle size of the multi-layered electrode materials is kept small, the occurrence of voids in the film is prevented and life time of the surface acoustic wave device is elongated.