Abstract: According to one aspect of the technique of the present disclosure, there is provided a substrate processing apparatus including: a temperature detector for detecting a temperature of a heat generator for elevating a temperature of a process chamber by generating heat; a temperature regulator for adjusting a ratio of outputting an electric power capable of being supplied to the heat generator in a unit time to reduce a difference between a temperature obtained from the temperature detector and a temperature setting value; a measurer or measuring a current flowing through a circuit containing the heat generator; and an abnormality detector for comparing a current measurement value measured by the measurer and a theoretical current value calculated based on the ratio of outputting the electric power acquired from the temperature regulator and determine that there is an abnormality when the current measurement value and the theoretical current value are different.

Abstract: There is provided a technique that includes: a process chamber accommodating substrate; a storage tank including bottom portion having recess and wall portion and storing liquid precursor; a vaporizing part vaporizing the stored liquid precursor to generate precursor gas; a supply part supplying the generated precursor gas to the process chamber; a sensor disposed in the recess and detecting liquid level of the stored liquid precursor; a replenishment part replenishing the liquid precursor in the storage tank; and a controller controlling the supply part to supply the precursor gas to the process chamber to perform a substrate processing process for processing the substrate, and controlling, each time when the substrate processing process is performed a predetermined number of times, the replenishment part, based on the detected liquid level, to replenish the liquid precursor in the storage tank so that the liquid level becomes a predetermined level.

Abstract: There is provided a technique that includes: a process chamber accommodating substrate; a storage tank including bottom portion having recess and wall portion and storing liquid precursor; a vaporizing part vaporizing the stored liquid precursor to generate precursor gas; a supply part supplying the generated precursor gas to the process chamber; a sensor disposed in the recess and detecting liquid level of the stored liquid precursor; a replenishment part replenishing the liquid precursor in the storage tank; and a controller controlling the supply part to supply the precursor gas to the process chamber to perform a substrate processing process for processing the substrate, and controlling, each time when the substrate processing process is performed a predetermined number of times, the replenishment part, based on the detected liquid level, to replenish the liquid precursor in the storage tank so that the liquid level becomes a predetermined level.

Abstract: A method for inhibiting scale including inorganic cations, and an economically operable geothermal power generating device which can inhibit deposition of scale. The geothermal power generating device includes: an inorganic cation concentration measuring device for measuring the concentration of bivalent or more inorganic cations in geothermal water collected from a production well; a flowmeter for measuring the flow rate of the geothermal water collected from the production well; a heat removal unit for lowering the temperature of the geothermal water; a thermometer for measuring the temperature of the geothermal water after removing heat; a pH measuring device for measuring the pH of the geothermal water after removing heat; a calculation processing unit for calculating the additive amount of a scale inhibitor; and a control unit for adding the scale inhibitor to the geothermal water by the amount calculated by the calculation processing unit.

Abstract: A scale suppression apparatus capable of suppressing in a low-priced manner the generation of silica-based scale and calcium-based scale in the influent water containing at least a silica component and a calcium component, a geothermal power generation system using the same, and a scale suppression method are provided. The scale suppression apparatus includes a chelating agent and alkaline agent addition unit injecting liquid containing a chelating agent and an alkaline agent into a pipe arrangement through which influent water such as geothermal water or the like flows, and a controller controlling a pump and a valve of the chelating agent and alkaline agent addition unit. The controller controls the injection of the chelating agent and the alkaline agent and stops of the injection based on the signal output from a scale detection unit for detecting a precipitation state of the scale.

Abstract: A scale suppression apparatus capable of suppressing in a low-priced manner the generation of silica-based scale and calcium-based scale in the influent water, a geothermal power generation system using the same, and a scale suppression method are provided. The apparatus includes a first addition unit configured to add liquid containing a chelating agent and an alkaline agent to influent water flowing through a pipe arrangement to make the influent water higher than pH 7, a second addition unit configured to add an acid substance to the influent water to make the influent water lower than pH 7, and a controller configured to alternatively switch between the operation of the first addition unit and the operation of the second addition unit. The controller controls the switching of the first addition unit and the second addition unit based on the signals output from a scale detection unit and a pH meter.

Abstract: A binary power generation device is equipped with the flow path of a medium circulating through a heat exchanger, a turbine, a condenser, and a pump. A method for removing air that has intruded into the flow path of the medium includes: an air intrusion detection step of calculating, based on the pressure and temperature of a gas retaining portion communicatively connected to the flow path of the medium, a pressure threshold value obtained by adding the saturated vapor pressure of the medium and a margin value and of detecting, by comparing the pressure of a gas phase portion with the pressure threshold value, that air has intruded into the medium; a medium liquefaction step of producing a gas by pressurizing a mixed gas of the medium and air to reduce the amount of the medium in the mixed gas; and an exhaust step of exhausting the gas.

Abstract: A scale deposition testing device, which is capable of precisely evaluating the state of scale deposition in consideration of an effect of retained geothermal water that occurs in an actual geothermal power plant, includes a plurality of scale deposition containers filled with particulates; hot water supply means for causing hot water to flow through each of the scale deposition containers; a retention unit for retaining the hot water; hot water condition change means for changing at least one of the flow rate, temperature, pressure, and composition of the hot water for each of the scale deposition containers; measuring means for measuring at least one of the flow rate, temperature, and pressure of the hot water flowing through each of the scale deposition containers; and a recorder for receiving data from the measuring means, the retention unit being capable of changing the hot water retention time.

Abstract: A device for automatically detecting and removing air from a gas mixture of an organic gas and air includes calculating a saturation pressure value based on a temperature of the gas mixture in a reservoir 1, and obtaining a pressure threshold value by adding a margin value to the saturation pressure value. When the pressure value inside the reservoir 1 is higher than the pressure threshold value, air is detected to be in the gas mixture. After this detection, a controller 5 pressurizes and introduces the gas mixture into a pressure container 2 to condense the organic gas in the gas mixture, thus producing a diluted gas mixture. Subsequently, the diluted gas mixture is introduced to a supply side of a membrane unit 3, the organic gas in the diluted gas mixture is recovered at a permeation side thereof, and a residual gas is discharged outside of the device.

Abstract: A scale inhibition method for injecting an alkaline agent and a chelating agent into a fluid containing at least silica and calcium ions, and inhibiting generation of scale, includes feeding the chelating agent and the alkaline agent into piping channeling the fluid, mixing the fluid while causing the fluid to flow in a chemical-mixing part provided in the piping, and when either a pressure difference between the pressures or a flow rate difference between the rates of fluid flow at an inlet and an outlet of the chemical-mixing part exceeds a preset upper threshold, increasing the amount of the chelating agent fed, and feeding the chelating agent at an increased feed amount until the pressure difference or flow rate difference falls below a preset lower threshold.

Abstract: A scale suppression apparatus capable of suppressing in a low-priced manner the generation of silica-based scale and calcium-based scale in the influent water, a geothermal power generation system using the same, and a scale suppression method are provided. The apparatus includes a first addition unit configured to add liquid containing a chelating agent and an alkaline agent to influent water flowing through a pipe arrangement to make the influent water higher than pH 7, a second addition unit configured to add an acid substance to the influent water to make the influent water lower than pH 7, and a controller configured to alternatively switch between the operation of the first addition unit and the operation of the second addition unit. The controller controls the switching of the first addition unit and the second addition unit based on the signals output from a scale detection unit and a pH meter.

Abstract: A scale suppression apparatus capable of suppressing in a low-priced manner the generation of silica-based scale and calcium-based scale in the influent water containing at least a silica component and a calcium component, a geothermal power generation system using the same, and a scale suppression method are provided. The scale suppression apparatus includes a chelating agent and alkaline agent addition unit injecting liquid containing a chelating agent and an alkaline agent into a pipe arrangement through which influent water such as geothermal water or the like flows, and a controller controlling a pump and a valve of the chelating agent and alkaline agent addition unit. The controller controls the injection of the chelating agent and the alkaline agent and stops of the injection based on the signal output from a scale detection unit for detecting a precipitation state of the scale.

Abstract: A scale deposition testing device, which is capable of precisely evaluating the state of scale deposition in consideration of an effect of retained geothermal water that occurs in an actual geothermal power plant, includes a plurality of scale deposition containers filled with particulates; hot water supply means for causing hot water to flow through each of the scale deposition containers; a retention unit for retaining the hot water; hot water condition change means for changing at least one of the flow rate, temperature, pressure, and composition of the hot water for each of the scale deposition containers; measuring means for measuring at least one of the flow rate, temperature, and pressure of the hot water flowing through each of the scale deposition containers; and a recorder for receiving data from the measuring means, the retention unit being capable of changing the hot water retention time.

Abstract: A device for automatically detecting and removing air from a gas mixture of an organic gas and air includes calculating a saturation pressure value based on a temperature of the gas mixture in a reservoir 1, and obtaining a pressure threshold value by adding a margin value to the saturation pressure value. When the pressure value inside the reservoir 1 is higher than the pressure threshold value, air is detected to be in the gas mixture. After this detection, a controller 5 pressurizes and introduces the gas mixture into a pressure container 2 to condense the organic gas in the gas mixture, thus producing a diluted gas mixture. Subsequently, the diluted gas mixture is introduced to a supply side of a membrane unit 3, the organic gas in the diluted gas mixture is recovered at a permeation side thereof, and a residual gas is discharged outside of the device.

Abstract: A binary power generation device is equipped with the flow path of a medium circulating through a heat exchanger, a turbine, a condenser, and a pump. A method for removing air that has intruded into the flow path of the medium includes: an air intrusion detection step of calculating, based on the pressure and temperature of a gas retaining portion communicatively connected to the flow path of the medium, a pressure threshold value obtained by adding the saturated vapor pressure of the medium and a margin value and of detecting, by comparing the pressure of a gas phase portion with the pressure threshold value, that air has intruded into the medium; a medium liquefaction step of producing a gas by pressurizing a mixed gas of the medium and air to reduce the amount of the medium in the mixed gas; and an exhaust step of exhausting the gas.

Abstract: A scale inhibition method for injecting an alkaline agent and a chelating agent into a fluid containing at least silica and calcium ions, and inhibiting generation of scale, includes feeding the chelating agent and the alkaline agent into piping channeling the fluid, mixing the fluid while causing the fluid to flow in a chemical-mixing part provided in the piping, and when either a pressure difference between the pressures or a flow rate difference between the rates of fluid flow at an inlet and an outlet of the chemical-mixing part exceeds a preset upper threshold, increasing the amount of the chelating agent fed, and feeding the chelating agent at an increased feed amount until the pressure difference or flow rate difference falls below a preset lower threshold.

Abstract: A method for inhibiting scale including inorganic cations, and an economically operable geothermal power generating device which can inhibit deposition of scale. The geothermal power generating device includes: an inorganic cation concentration measuring device for measuring the concentration of bivalent or more inorganic cations in geothermal water collected from a production well; a flowmeter for measuring the flow rate of the geothermal water collected from the production well; a heat removal unit for lowering the temperature of the geothermal water; a thermometer for measuring the temperature of the geothermal water after removing heat; a pH measuring device for measuring the pH of the geothermal water after removing heat; a calculation processing unit for calculating the additive amount of a scale inhibitor; and a control unit for adding the scale inhibitor to the geothermal water by the amount calculated by the calculation processing unit.

Abstract: The present invention provides a crankcase compression type two-cycle engine which has a comparatively simple construction, is capable of operating at a low fuel consumption and discharges an exhaust gas having a comparatively low hydrocarbon concentration. The engine comprises a crankcase, a piston, a cylinder joined to the crankcase and provided in its lower part with an exhaust port which is opened and closed by the piston, a cylinder head attached to the upper end of the cylinder, and forming a combustion chamber together with the cylinder and the piston. A poppet scavenging valve is provided in the upper part of the cylinder so as to be opened to the combustion chamber side. A diaphragm actuator operates the poppet scavenging valve using the pressure within the crankcase. The diaphragm actuator is provided with a diaphragm that receives the pressure within the crankcase on one side thereof and receives the pressure of a spring on the other side thereof.

Abstract: A 4-cycle internal combustion engine including a crankcase, a cylinder, a cylinder head, a piston adapted to reciprocate within the cylinder, a combustion chamber formed by the piston, the cylinder and the cylinder head, and a crankshaft connected to the piston via a connecting rod, is improved in order to enhance its thermal efficiency, to reduce exhaust emissions and to make it possible to operate the engine while the engine is in any attitude.

Abstract: An electrodeless microwave-generated radiation apparatus includes a microwave cavity wall made of metal material defining a microwave cavity, a lamp arranged in the microwave cavity containing emission material, a microwave generator supplying microwaves for exciting the emission material in the lamp, a microwave-coupling means coupling microwaves to the lamp through a waveguide, and a dielectric mirror arranged behind the lamp. The rise time of the apparatus can be remarkably shortened compared with the known art so that the damage of a magnetron can be reduced. The intensity of emission along the lamp is controlled by a projection or parasitic element. Further, by the use of a dielectric mirror, the object can be processed without temperature of the object to rise too high.