Abstract: An intermediate base material is provided that is excellent in the conformity to three-dimensional shapes and that, when formed into a fiber reinforced plastic, develops good surface quality and high mechanical properties. According to one aspect, an incised prepreg is provided that has, in at least a partial region in a prepreg that contains unidirectionally oriented reinforcing fibers and a resin, a plurality of incisions that divide reinforcing fibers, wherein, in the case where a population is made up of the numbers of incisions contained in ten small circular regions of 10 mm in diameter randomly selected in the aforementioned region, a mean value for the population is 10 or greater and a coefficient of variation therefor is within 20%.

Abstract: An active matrix substrate includes, in each pixel region, a pixel TFT of an oxide semiconductor layer having source and drain regions, a first insulating layer disposed on top of the oxide semiconductor layer, an extraction electrode, disposed on top of the first insulating layer, that includes a transparent conductive film, and a pixel electrode connected to the extraction electrode. The first insulating layer includes first and second contact holes located above the source and drain regions, respectively. Part of a source bus line overlaps part of the source region and is connected to the source region via the first contact hole. The extraction electrode is connected to the drain region via the second contact hole. Shapes of bottoms of the first and second contact holes are different from each other, and the shape of the bottom of the second contact hole includes two orthogonal sides.

Abstract: An active matrix substrate includes, in each pixel region, a pixel TFT of an oxide semiconductor layer having source and drain regions, a first insulating layer disposed on top of the oxide semiconductor layer, an extraction electrode, disposed on top of the first insulating layer, that includes a transparent conductive film, and a pixel electrode connected to the extraction electrode. The first insulating layer includes first and second contact holes located above the source and drain regions, respectively. Part of a source bus line overlaps part of the source region and is connected to the source region via the first contact hole. The extraction electrode is connected to the drain region via the second contact hole. Shapes of bottoms of the first and second contact holes are different from each other, and the shape of the bottom of the second contact hole includes two orthogonal sides.

Abstract: An intermediate base material is provided that is excellent in the conformity to three-dimensional shapes and that, when formed into a fiber reinforced plastic, develops good surface quality and high mechanical properties. According to one aspect, an incised prepreg is provided that has, in at least a partial region in a prepreg that contains unidirectionally oriented reinforcing fibers and a resin, a plurality of incisions that divide reinforcing fibers, wherein, in the case where a population is made up of the numbers of incisions contained in ten small circular regions of 10 mm in diameter randomly selected in the aforementioned region, a mean value for the population is 10 or greater and a coefficient of variation therefor is within 20%.

Abstract: An intermediate base material is provided that is excellent in the conformity to three-dimensional shapes and that, when formed into a fiber reinforced plastic, develops good surface quality and high mechanical properties. According to one aspect, an incised prepreg is provided that has, in at least a partial region in a prepreg that contains unidirectionally oriented reinforcing fibers and a resin, a plurality of incisions that divide reinforcing fibers, wherein, in the case where a population is made up of the numbers of incisions contained in ten small circular regions of 10 mm in diameter randomly selected in the aforementioned region, a mean value for the population is 10 or greater and a coefficient of variation therefor is within 20%.

Abstract: When an electronic mail is transmitted, a computer outputs to a display device a transmission confirmation screen on which a destination or an attached file name is displayed, the destination or the attached file name being different from a destination or an attached file name that has been set by a user in the electronic mail, and on which whether transmission of the electronic mail will be performed is selectable. Upon receipt of selection of whether the transmission will be performed, the computer outputs to the display device message information that varies according to a result of the selection of whether the transmission will be performed on the transmission confirmation screen.

Abstract: An intermediate base material is provided that is excellent in the conformity to three-dimensional shapes and that, when formed into a fiber reinforced plastic, develops good surface quality and high mechanical properties. According to one aspect, an incised prepreg is provided that has, in at least a partial region in a prepreg that contains unidirectionally oriented reinforcing fibers and a resin, a plurality of incisions that divide reinforcing fibers, wherein, in the case where a population is made up of the numbers of incisions contained in ten small circular regions of 10 mm in diameter randomly selected in the aforementioned region, a mean value for the population is 10 or greater and a coefficient of variation therefor is within 20%.

Abstract: A substrate processing system includes a monitored data receiving unit receiving a plurality of types of monitored data; a temporary memory unit periodically storing the monitored data; a monitored data rate detection unit detecting, as a monitored data rate, a total number of times each type of monitored data changes during a first time period by more than a predetermined amount; a monitored data writing allocation unit allocating a storing frequency to each type of monitored data based on the monitored data rate and an upper limit; a monitored data writing unit writing the monitored data to the temporary memory unit during the second time period based on the storing frequency; an accumulative memory unit storing the monitored data for a plurality of periods; and an accumulative data writing unit reading the monitored data for every third time period and storing the monitored data in the accumulative memory unit.

Abstract: When an electronic mail is transmitted, a computer outputs to a display device a transmission confirmation screen on which a destination or an attached file name is displayed, the destination or the attached file name being different from a destination or an attached file name that has been set by a user in the electronic mail, and on which whether transmission of the electronic mail will be performed is selectable. Upon receipt of selection of whether the transmission will be performed, the computer outputs to the display device message information that varies according to a result of the selection of whether the transmission will be performed on the transmission confirmation screen.

Abstract: There is provided a communication unit configured to receive monitor data showing a progress state of substrate processing or a state of substrate processing apparatus, from a substrate processing apparatus; a database part configured to readably store the monitor data received by the communication unit, in association with production information data; a file archive part configured to read the monitor data and the production information data from the database part, then create typical value data based on the monitor data, and prepare a file including the monitor data, the production information data, and the typical value data, and readably store this file; and a data searching part configured to receive an input of a prescribed searching condition to search the file, and display data stored in the file and matching with the searching condition, on a display unit.

Abstract: A substrate processing system includes a monitored data receiving unit receiving a plurality of types of monitored data; a temporary memory unit periodically storing the monitored data; a monitored data rate detection unit detecting, as a monitored data rate, a total number of times each type of monitored data changes during a first time period by more than a predetermined amount; a monitored data writing allocation unit allocating a storing frequency to each type of monitored data based on the monitored data rate and an upper limit; a monitored data writing unit writing the monitored data to the temporary memory unit during the second time period based on the storing frequency; an accumulative memory unit storing the monitored data for a plurality of periods; and an accumulative data writing unit reading the monitored data for every third time period and storing the monitored data in the accumulative memory unit.

Abstract: There is provided a communication unit configured to receive monitor data showing a progress state of substrate processing or a state of substrate processing apparatus, from a substrate processing apparatus; a database part configured to readably store the monitor data received by the communication unit, in association with production information data; a file archive part configured to read the monitor data and the production information data from the database part, then create typical value data based on the monitor data, and prepare a file including the monitor data, the production information data, and the typical value data, and readably store this file; and a data searching part configured to receive an input of a prescribed searching condition to search the file, and display data stored in the file and matching with the searching condition, on a display unit.

Abstract: There is provided a substrate processing system that can automatically inspect the operation of various kinds of parts of a semiconductor manufacturing apparatus without increasing the load of a main controller in the semiconductor manufacturing apparatus. In the substrate processing system of the present invention, inspection data of the semiconductor manufacturing apparatus 1 under operation are shared and collected online by a main controller 5, a data collection auxiliary computer 2 and a data collecting computer 3 through a network 6, and the operation state is collectively inspected by an inspecting computer 4.

Abstract: There is provided a substrate processing system that can automatically inspect the operation of various kinds of parts of a semiconductor manufacturing apparatus without increasing the load of a main controller in the semiconductor manufacturing apparatus. In the substrate processing system of the present invention, inspection data of the semiconductor manufacturing apparatus 1 under operation are shared and collected online by a main controller 5, a data collection auxiliary computer 2 and a data collecting computer 3 through a network 6, and the operation state is collectively inspected by an inspecting computer 4.

Abstract: A substrate processing system is provided, in which collection data transmitted from a substrate processing apparatus can be easily used. A substrate processing system includes a substrate processing apparatus, and a group control apparatus connected to the substrate processing apparatus, wherein the group control apparatus comprises accumulation means for accumulating collection data transmitted from the substrate processing apparatus, storage part for correlating hardware information of components configuring the substrate processing apparatus with previously set element name information and then storing such correlated information, and a memory for correlating the hardware information with the collection data transmitted from the substrate processing apparatus and then memorizing such correlated information.

Abstract: The present invention relates to a fastening member fastening apparatus for positioning and fastening a hexagon head bolt (2) with respect to a nut (7) with an opening (7a). The fastening member fastening apparatus comprises a rotary axle body (1) being rotated by a drive source, a forwardly and backwardly movable socket (3) being connected with a tip end of the rotary axle body (1) and fitting thereon the hexagon head bolt (2), and a guide mechanism (5) having triple claw members (4) which are operated to open and close in accordance with the forward and backward movement of the socket (3). A tip end of the guide mechanism (5) in a closed state is inserted into the opening (7a) of the nut (7) so as to position and fasten the hexagon head bolt (2) with respect to the nut (7).

Abstract: The present invention relates to a fastening member fastening apparatus for positioning and fastening a hexagon head bolt (2) with respect to a nut (7) with an opening (7a). The fastening member fastening apparatus comprises a rotary axle body (1) being rotated by a drive source, a forwardly and backwardly movable socket (3) being connected with a tip end of the rotary axle body (1) and fitting thereon the hexagon head bolt (2), and a guide mechanism (5) having triple claw members (4) which are operated to open and close in accordance with the forward and backward movement of the socket (3). A tip end of the guide mechanism (5) in a closed state is inserted into the opening (7a) of the nut (7) so as to position and fasten the hexagon head bolt (2) with respect to the nut (7).