Abstract: To include reading design data of a plurality of patterns formed on a sample and characteristic information indicating characteristics of each of the patterns from a storage device, the characteristic information being additionally written in the design data, dividing a pattern formed region of the sample on which the patterns are formed, into a plurality of regions where the characteristics are different from each other on a basis of the characteristic information, calculating parameter information according to the characteristics with respect to each of the regions, where the parameter information is provided for generating a reference image from the design data to be used in an inspection of the patterns, and generating the reference image from the design data on a basis of the calculated parameter information.

Abstract: To include reading design data of a plurality of patterns formed on a sample and characteristic information indicating characteristics of each of the patterns from a storage device, the characteristic information being additionally written in the design data, dividing a pattern formed region of the sample on which the patterns are formed, into a plurality of regions where the characteristics are different from each other on a basis of the characteristic information, calculating parameter information according to the characteristics with respect to each of the regions, where the parameter information is provided for generating a reference image from the design data to be used in an inspection of the patterns, and generating the reference image from the design data on a basis of the calculated parameter information.

Abstract: A solar panel unit (10) includes a control unit (73) which operates an actuator (41) such that an angle of a solar panel (20) coincides with a predetermined command angle. The control unit (73) performs reset control for resetting the angle of the solar panel (20) misaligned due to strong wind. In the reset control, the actuator (41) is not operated until a predetermined time has passed since the angle of the solar panel (20) was misaligned to wait for the strong wind to stop, and then the actuator (41) is operated to reset the angle of the solar panel (20).

Abstract: An inspection method and inspection apparatus comprising, acquiring an optical image of a pattern formed in a sample, generating a reference image corresponding to the optical image, comparing the optical image and the reference image using a die-to-database method to detect a defect in the optical image and storing information on the defect; regenerating a reference image by reflecting a dimension distribution of a pattern in the surface of the sample on the reference image, and re-comparing an optical image in which a defect is detected by the comparison using the die-to-database method and the regenerated reference image which corresponds to the optical image using the die-to-database method to detect the defect in the optical image in which the defect has been detected, storing information on the defect when the defect is redetected, and determining that the optical image has no defect.

Abstract: A solar panel unit (10) includes a control unit (73) which operates an actuator (41) such that an angle of a solar panel (20) coincides with a predetermined command angle. The control unit (73) performs reset control for resetting the angle of the solar panel (20) misaligned due to strong wind. In the reset control, the actuator (41) is not operated until a predetermined time has passed since the angle of the solar panel (20) was misaligned to wait for the strong wind to stop, and then the actuator (41) is operated to reset the angle of the solar panel (20).

Abstract: In a solar panel unit including: a pedestal that includes a support supporting a rotation shaft fixed to a solar panel and is fixed to the ground; and a drive mechanism that rotates the solar panel about the axis of the rotation shaft in accordance with the direction of the sun, the pedestal is a stake having an upper end provided with the support and a lower end to be buried in the ground, and the depth to which the stake is pushed is adjusted. Thus, the heights of the pedestal can be adjusted. In this manner, the solar panel unit can be easily placed at an accurate position without ground leveling, and a plurality of link mechanisms can be easily joined together.

Abstract: An inspection method and inspection apparatus comprising, acquiring an optical image of a pattern formed in a sample, generating a reference image corresponding to the optical image, comparing the optical image and the reference image using a die-to-database method to detect a defect in the optical image and storing information on the defect; regenerating a reference image by reflecting a dimension distribution of a pattern in the surface of the sample on the reference image, and re-comparing an optical image in which a defect is detected by the comparison using the die-to-database method and the regenerated reference image which corresponds to the optical image using the die-to-database method to detect the defect in the optical image in which the defect has been detected, storing information on the defect when the defect is redetected, and determining that the optical image has no defect.

Abstract: A system for controlling a solar power conversion unit includes a power detecting section configured to detect output power of at least one solar cell, an insolation amount inputting section to which an index related to an amount of insolation is input, a power correcting section configured to correct the output power detected by the power detecting section on the basis of the index related to the amount of insolation input to the insolation amount inputting section, and a voltage controlling section configured to change an output voltage of the solar cell on the basis of the output power corrected by the power correcting section such that the output power of the solar cell approaches the maximum power point.