Abstract: A load positioning apparatus includes a movable table that is urged and held at a forward limit position by a movable-table urging element, a load-supporting roller that allows the load to laterally move on a horizontal surface, and a load-positioning roller that is supported on the movable table and adjoins the side face of the load supported in the fixed position on the load supporting roller. The urging element allows the table to recede together with the load-positioning roller when a load is vertically lowered at a position where the load-positioning roller is pushed outwardly with respect to the fixed position. The urging element has an urging force sufficient to return the movable table to the forward limit position so as to push back the load to the fixed position via the load positioning roller.

Abstract: Substrate storage facility includes a container that holds a plurality of the substrates with the substrates lined up vertically with space therebetween and that is tubular having a generally quadrangular cross section, the container including a first opening provided on one end side and a second opening provided on the other end side spaced apart in a horizontal direction from the first opening, the first opening serving as an entrance for loading and unloading the substrate; a fan filter unit, provided in an area of the second opening of the container, that causes movement of air from the second opening toward the first opening; and a controller that controls an operation of the container transfer device such that the container is stored in the storage section with a side of the container where the fan filter unit is provided is positioned toward the traveling space, and the entrance side of the container is positioned away from the traveling space.

Abstract: A method for processing substrates for a substrate processing facility includes the steps of: performing ventilation of a container with a fan filter unit while a lid of the container is in a closed state, when the container is stored in a storage shelf, and when the container is transferred with a substrate transfer device, and ventilating the container with the fan filter with the lid of the container in an open state, when substrates are transferred in a substrate loading/unloading section with the substrate transfer device.

Abstract: A container configured to hold a plurality of substrates lined up vertically with space therebetween, which includes a container main unit formed in a tube shape having a quadrangular cross section as a whole that includes a first opening provided on one end side and a second opening provided on the other end side of the container spaced apart in the horizontal direction from the first opening, the first opening serving as an entrance for loading and unloading the substrates, a fan filter unit that is provided in an area of the second opening and that causes movement of air from the second opening toward the first opening, and a lid configured to be attached in an area of the entrance of the container main unit, the lid having an open state and a closed state, and forming a ventilation opening that allows air to pass in the closed state.

Abstract: A floating unit comprises: a stationary portion; a movable portion supported to be movable relative to the stationary portion and including an article support; a support disposed between the stationary portion and the movable portion, the support having a plurality of rolling elements rotatably held by a holder between an upwardly facing first contact surface provided on the stationary portion and a downwardly facing second contact surface provided on the movable portion, whereby the support is movable in all horizontal directions relative to the movable portion and the stationary portion; a movable portion returning device for biasing the movable portion relative to the stationary portion toward a reference position for receiving an article; and a support returning device for biasing the support horizontally relative to the stationary portion toward a reference position for holding the movable portion.

Abstract: The method for processing substrates for substrate processing facility includes the steps of performing ventilation a the fan filter unit while putting a lid of a container in a closed state, when the container is stored in a storage shelf, and is transferred with a substrate transfer device, and ventilating the container with the fan filter with the lid of the container in an open state, when substrates are transferred in a substrate loading/unloading section with the substrate transfer device.

Abstract: Substrate storage facility includes a container that holds a plurality of the substrates with the substrates lined up vertically with space therebetween and that is tubular having a generally quadrangular cross section, the container including a first opening provided on one end side and a second opening provided on the other end side spaced apart in a horizontal direction from the first opening, the first opening serving as an entrance for loading and unloading the substrate; a fan filter unit, provided in an area of the second opening of the container, that causes movement of air from the second opening toward the first opening; and a controller that controls an operation of the container transfer device such that the container is stored in the storage section with a side of the container where the fan filter unit is provided is positioned toward the traveling space, and the entrance side of the container is positioned away from the traveling space.

Abstract: A container configured to hold a plurality of substrates lined up vertically with space therebetween, which includes a container main unit formed in a tube shape having a quadrangular cross section as a whole that includes a first opening provided on one end side and a second opening provided on the other end side of the container spaced apart in the horizontal direction from the first opening, the first opening serving as an entrance for loading and unloading the substrates, a fan filter unit that is provided in an area of the second opening and that causes movement of air from the second opening toward the first opening, and a lid configured to be attached in an area of the entrance of the container main unit, the lid having an open state and a closed state, and forming a ventilation opening that allows air to pass in the closed state.

Abstract: The invention discloses a transporting apparatus that transmits a drive force to a transported object in a state where the transported object is supported by a air-supplying-type support apparatus. In one implementation thereof, a device for transferring drive force to a transported object transfers drive force to one side in the width direction, which is perpendicular to the transporting direction. In another implementation thereof, the transporting apparatus can be switched between a horizontal state in which the transported object is supported substantially horizontally, and an upright state.

Abstract: It is an object of the present invention to provide a plate-shaped work piece transporting apparatus that has a fan, a dust-removal filter disposed above this fan, and a plate-shape porous member disposed above the dust-removal filter. By forming a chamber in which air can accumulate between the porous member and the dust-removal filter, it is possible to suppress air pulsations. Further, by providing support members on the porous member, the plate-shaped work piece can be supported and damage thereto can be avoided when the plate-shaped work piece, which is supported by air from the fan, drops to below a set height.

Abstract: A load positioning apparatus includes a movable table that is urged and held at a forward limit position by a movable-table urging element, a load-supporting roller that allows the load to laterally move on a horizontal surface, and a load-positioning roller that is supported on the movable table and adjoins the side face of the load supported in the fixed position on the load supporting roller. The urging element allows the table to recede together with the load-positioning roller when a load is vertically lowered at a position where the load-positioning roller is pushed outwardly with respect to the fixed position. The urging element has an urging force sufficient to return the movable table to the forward limit position so as to push back the load to the fixed position via the load positioning roller.

Abstract: The invention discloses a transporting apparatus provided with a air-supplying-type support device for supplying purified air toward a lower surface of a transported object to contactlessly support the transported object in a horizontal orientation or a substantially horizontal orientation, a drive force application device for applying a drive force in the transporting direction to the transported object, a first transport member, a second transport member, and a relay transport member that links the first transport member and the second transport member. The drive force application device applies a drive force by contacting a lower surface of the transported object that is supported by the air-supplying-type support device. The relay transport member changes at least one of the transporting direction and the transporting orientation of the transported object.

Abstract: A floating unit comprises: a stationary portion; a movable portion supported to be movable relative to the stationary portion and including an article support; a support disposed between the stationary portion and the movable portion, the support having a plurality of rolling elements rotatably held by a holder between an upwardly facing first contact surface provided on the stationary portion and a downwardly facing second contact surface provided on the movable portion, whereby the support is movable in all horizontal directions relative to the movable portion and the stationary portion; a movable portion returning device for biasing the movable portion relative to the stationary portion toward a reference position for receiving an article; and a support returning device for biasing the support horizontally relative to the stationary portion toward a reference position for holding the movable portion.

Abstract: It is an object of the invention to provide an apparatus for transporting a transported object in a transporting direction as the transported object is supported by air, the apparatus having a plurality of transporting units. A specific transporting unit of the plurality of transporting units is controlled based on the transporting state of at least one other transporting unit. Thus, it is possible to reduce the number of problems that may occur during transporting.

Abstract: It is an object of the invention to provide an apparatus for transporting a transported object in a transporting direction as the transported object is supported by air, the apparatus having a plurality of transporting units. A specific transporting unit of the plurality of transporting units is controlled based on the transporting state of at least one other transporting unit. Thus, it is possible to reduce the number of problems that may occur during transporting.

Abstract: It is an object to provide a plate-shaped work piece transporting apparatus provided with a blowing mechanism for contactlessly supporting a plate-shaped work piece that is transported, where the blowing mechanism is provided with a dust-removal filter and a blowing mechanism for sending air to the lower surface of the plate-shaped work piece via the dust-removal filter. In a first embodiment, a driving mechanism for contacting the plate-shaped work piece and moving it in the transporting direction is provided.

Abstract: The invention discloses a transporting apparatus having a transport member provided with a air-supplying-type support portion for supplying purified air toward a lower surface of a transported object to contactlessly support the transported object, and a drive force application portion for contacting a lower surface of the transported object that is supported by the air-supplying-type support means and applying a drive force in the transporting direction to the transported object. The transporting apparatus, by raising and lowering the drive force application portion and the air-supplying-type support portion relative to one another, can be switched between a transport state where the drive force application portion is brought into contact with the lower surface of the transported object, and a transfer state where the drive force application portion is moved downward away from the transported object that is supported by the air-supplying-type support portion.

Abstract: The invention discloses a transporting apparatus having a transport member provided with a air-supplying-type support portion for supplying purified air toward a lower surface of a transported object to contactlessly support the transported object, and a drive force application portion for contacting a lower surface of the transported object that is supported by the air-supplying-type support means and applying a drive force in the transporting direction to the transported object. The transporting apparatus, by raising and lowering the drive force application portion and the air-supplying-type support portion relative to one another, can be switched between a transport state where the drive force application portion is brought into contact with the lower surface of the transported object, and a transfer state where the drive force application portion is moved downward away from the transported object that is supported by the air-supplying-type support portion.

Abstract: The invention discloses a transporting apparatus provided with a air-supplying-type support device for supplying purified air toward a lower surface of a transported object to contactlessly support the transported object in a horizontal orientation or a substantially horizontal orientation, a drive force application device for applying a drive force in the transporting direction to the transported object, a first transport member, a second transport member, and a relay transport member that links the first transport member and the second transport member. The drive force application device applies a drive force by contacting a lower surface of the transported object that is supported by the air-supplying-type support device. The relay transport member changes at least one of the transporting direction and the transporting orientation of the transported object.

Abstract: The invention discloses a transporting apparatus that transmits a drive force to a transported object in a state where the transported object is supported by a air-supplying-type support apparatus. In one implementation thereof, a device for transferring drive force to a transported object transfers drive force to one side in the width direction, which is perpendicular to the transporting direction. In another implementation thereof, the transporting apparatus can be switched between a horizontal state in which the transported object is supported substantially horizontally, and an upright state.