Abstract: Provided is an axial gap motor provided with a rotor fixed to a rotary shaft, a stator facing the rotor along a shaft direction, a flow passage forming body that forms a flow passage through which a cooling refrigerant is flowed, and a housing that houses the rotor and the stator and that holds the flow passage forming body. The flow passage forming body forms an inflow port provided on a first surface of the housing facing the shaft direction, a flow passage portion passing from the inflow port through a lateral portion of the rotor in a radial direction, and a discharge port connected to the flow passage portion and provided closer to the stator than the rotor in the shaft direction.

Abstract: A method of and an apparatus for manufacturing semiconductors, in which a liquid raw material can be uniformly supplied onto a wafer and a gas required for film formation can be also uniformly supplied onto the wafer. A liquid raw material is sprayed from a tip end of a vaporizing nozzle into a vacuum chamber as liquid droplets, and is vaporized by heat generated from the wafer placed on a susceptor. When the liquid raw material is sprayed, a gas required for film forming reaction is supplied into the vacuum chamber from a gas supply pipe provided on an outer periphery of the vaporizing nozzle. The vaporizing nozzle and the gas supply pipe are formed to be concentric, and a liquid raw material spray port is formed centrally of the vaporizing nozzle.

Abstract: An analysis system in which air in a specimen exchange chamber is evacuated by an oil-sealed rotary vacuum pump and which employs electron incorporates a purge gas supply means at the inlet side of the oil-sealed rotary vacuum pump. The purge gas supply means supplies a small quantity of purge gas when the air in the specimen exchange chamber is evacuated to the almost ultimate pressure of the pump.

Abstract: A vacuum pump including a centrifugal compressor stage on the side of a suction opening and a circumferential flow compressor on the side of an exhaust opening. The centrifugal compressor pump works as a Siegbahn pump at a steady state, and works as a centrifugal compressor under a transient condition at the initial stage of the pump operation, thus obtaining a high pumping speed under the transient condition.

Abstract: A vacuum pump including a centrifugal compressor stage on the side of a suction opening and a circumferential flow compressor on the side of an exhaust opening. The centrifugal compressor pump works as a Siegbahn pump at a steady state, and works as a centrifugal compressor under a transient condition at the initial stage of the pump operation, thus obtaining a high pumping speed under the transient condition.