Abstract: A mechanism for preventing suction air from leaking uses a capturing carrier cartridge that includes a cartridge main body and a filter fixing ring. The cartridge main body includes a storage portion for storing a capturing carrier solution and a filter mounting portion where a filter for filtering the capturing carrier solution is disposed. The filter fixing ring covers the filter mounting portion, positions the filter, and sucks and filters the capturing carrier solution from a lower surface thereof. The mechanism includes a cartridge holder and a suction head. The cartridge holder includes an opening that includes the filter mounting portion of the capturing carrier cartridge, and a holding portion that holds the storage portion. The suction head sucks the capturing carrier solution through the lower surface of the filter fixing ring while applying pressure to press the filter fixing ring against the filter mounting portion.

Abstract: A transfer device for a substrate is capable of preventing deformation or breakage of the substrate due to bending stress by reducing the amount of dead weight deflection of the substrate, e.g. a large mother glass board. Supporting members extend in opposite directions from two sides of a storage device such that the substrate can be introduced or removed by raising and lowering the hand of a transfer machine inserted into the storage device between the supporting members. The supporting members are comprised of a plurality of supporting members in parallel, formed with a gap between the supporting members facing each other.

Abstract: The objective of the present invention is to provide a transfer device for substrate capable of preventing deformation or breakage of substrate due to bending stress, by reducing the amount of dead weight deflection of substrate, such as large mother glass boards, etc.