Abstract: The active shield superconducting electromagnet apparatus includes: a main switching circuit in which first and second main coils, first and second shield coils, and a first superconducting persistent current switch are connected in series; a sub switching circuit in which a bypass circuit, in which a superconducting fault current limiter and a second superconducting persistent current switch are connected in series, are connected to a series circuit of the first main coil and the second main coil in parallel; a first closed circuit in which at least one of the first main coil and the first shield coil, and a first quench protection circuit are connected in series; and a second closed circuit in which one of the second main coil and the second shield coil, and a second quench protection circuit are connected in series.

Abstract: In a charged-particle beam apparatus having a high-accuracy and high-resolution focusing optical system for charged-particle beam, a group of coils are arranged along a beam emission axis to extend through the contour of radial planes each radiating from the beam emission axis representing a rotary axis and each having a circular arc which subtends a divisional angle resulting from division of a circumferential plane by a natural number larger than 2 so that a superposed magnetic field may be generated on the incident axis of the charged-particle beam and the trajectory of the charged-particle beam may be controlled by the superposed magnetic field.

Abstract: In a charged-particle beam apparatus having a high-accuracy and high-resolution focusing optical system for charged-particle beam, a group of coils are arranged along a beam emission axis to extend through the contour of radial planes each radiating from the beam emission axis representing a rotary axis and each having a circular arc which subtends a divisional angle resulting from division of a circumferential plane by a natural number larger than 2 so that a superposed magnetic field may be generated on the incident axis of the charged-particle beam and the trajectory of the charged-particle beam may be controlled by the superposed magnetic field.

Abstract: The active shield superconducting electromagnet apparatus includes: a main switching circuit in which first and second main coils, first and second shield coils, and a first superconducting persistent current switch are connected in series; a sub switching circuit in which a bypass circuit, in which a superconducting fault current limiter and a second superconducting persistent current switch are connected in series, are connected to a series circuit of the first main coil and the second main coil in parallel; a first closed circuit in which at least one of the first main coil and the first shield coil, and a first quench protection circuit are connected in series; and a second closed circuit in which one of the second main coil and the second shield coil, and a second quench protection circuit are connected in series.

Abstract: In a charged-particle beam apparatus having a high-accuracy and high-resolution focusing optical system for charged-particle beam, a group of coils are arranged along a beam emission axis to extend through the contour of radial planes each radiating from the beam emission axis representing a rotary axis and each having a circular arc which subtends a divisional angle resulting from division of a circumferential plane by a natural number larger than 2 so that a superposed magnetic field may be generated on the incident axis of the charged-particle beam and the trajectory of the charged-particle beam may be controlled by the superposed magnetic field.

Abstract: A neutral beam processing apparatus and method uses a neutral beam having an enlarged diameter and an increased capacity with suppressed divergence. The charged particles of the neutral beam are removed and the variations in energy are reduced. In particular, an ion beam is led from a plasma production cell and neutralized in a neutralization cell to be converted to a neutral beam, and an object to be processed is disposed in a process cell that is irradiated with the neutral beam. A multi-aperture electrode and a permanent magnet line are used for separating charged particles from the neutral beam. By an interaction between an electron cyclotron magnetic field generated by the permanent magnet line and microwaves introduced from a waveguide, a plasma and a flat space potential is generated in the neutralization cell. The neutral beam is obtained by converting the ion beam in the flat space potential.

Abstract: The present invention is characterized by; detecting the volume of impurities in said vacuum vessel wherein plasma is generated by radio frequency power supplied to the target electrode and substrate electrode, and a target is sputtered by ions in said plasma, thereby forming films on the substrate, and controlling the phase difference of radio frequency power supplied to each of said electrodes according to said detection value.

Abstract: A charged particle generating device such as an ion implanter, a secondary ion mass spectrometer having a good mounting operability, a simple construction, good characteristics such as sensitivity, etc., owing to the fact that there is disposed a focusing electrode composed of the cylindrical electrodes disposed coaxially with each other, at least the inner electrode thereof having a plurality of openings.

Abstract: In a secondary charged particle analyzing apparatus such as a secondary ion mass analyzing apparatus, a scanning type electron mass analyzer, etc., in order to obtain a high resolving power and a high sensitivity, trajectories of secondary charged particles are corrected by means of an accelerating lens formed in a secondary charged particle extracting section disposed within the apparatus.

Abstract: A new cavity which is separate from a rf (radio frequency) accelerating cavity is provided on the orbit of charged particles in a ring-shaped accelerator, and an external oscillator and a coupled antenna which serve to excite a rf electromagnetic field in the separate cavity are provided. Using the external oscillator and the coupled antenna, a deflection mode which has electric field components in the direction of the central orbit of the charged particles and in which a magnetic field in a direction perpendicular to the plane of the central orbit develops on the central orbit of the charged particles is excited in a beam duct part of the separate cavity through which the charged particles pass.