Patents by Inventor Yoshiyasu Kato
Yoshiyasu Kato has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11776829Abstract: A dummy wafer includes a planar heater and a pair of plate-shaped members formed of an aluminum alloy, aluminum, or silicon carbide, wherein the planar heater is sandwiched by the plate-shaped members.Type: GrantFiled: February 17, 2021Date of Patent: October 3, 2023Assignee: TOKYO ELECTRON LIMITEDInventors: Shigeru Kasai, Yutaka Akaike, Yoshiyasu Kato, Hiroyuki Nakayama, Hiroaki Komiya
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Publication number: 20220015193Abstract: A method for adjusting a temperature of a substrate support is provided. In an apparatus for inspecting a target device, a substrate placement surface of the substrate support is divided into multiple regions and a heater is disposed in each of the multiple regions. The method comprises controlling the heater in a main region corresponding to the target device such that a temperature of the main region becomes a set temperature, and controlling the heater in a sub-region adjacent to the main region. When overshoot has not occurred in the temperature of the main region, the heater in the sub-region is controlled such that a temperature difference between the main region and the sub-region becomes a predetermined value, and when overshoot has occurred, the heater of the sub-region is controlled such that a difference between the set temperature and the temperature in the sub-region becomes the predetermined value.Type: ApplicationFiled: July 8, 2021Publication date: January 13, 2022Inventors: Shigeru KASAI, Hiroyuki NAKAYAMA, Yutaka AKAIKE, Hiroaki KOMIYA, Yoshiyasu KATO
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Publication number: 20210265183Abstract: A dummy wafer includes a planar heater and a pair of plate-shaped members formed of an aluminum alloy, aluminum, or silicon carbide, wherein the planar heater is sandwiched by the plate-shaped members.Type: ApplicationFiled: February 17, 2021Publication date: August 26, 2021Inventors: Shigeru KASAI, Yutaka AKAIKE, Yoshiyasu KATO, Hiroyuki NAKAYAMA, Hiroaki KOMIYA
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Patent number: 9759762Abstract: A probe device includes an electrode plate arranged above a mounting table for mounting thereon a semiconductor wafer and electrically connected to a tester, a contact probe arranged at a side of the mounting table and electrically connected to a mounting table electrode of the mounting table. The contact probe includes a contact portion, having a top surface formed uneven, to be in contact with the electrode plate, and a cable connection portion formed as one unit with the contact portion. The contact portion and the cable connection portion are vertically movable by a biasing member provided below the cable connection portion. When the probes are made contact with electrodes of a semiconductor device of the semiconductor wafer by moving up the mounting table, the contact portion and the electrode plate are made contact with each other and the backside electrode and the tester are electrically connected to each other.Type: GrantFiled: March 18, 2014Date of Patent: September 12, 2017Assignee: TOKYO ELECTRON LIMITEDInventors: Eiichi Shinohara, Munetoshi Nagasaka, Ken Taoka, Yoshiyasu Kato
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Patent number: 9638719Abstract: A probe device includes an electrode plate arranged above a mounting table for mounting thereon a semiconductor wafer and electrically connected to a tester, a connection conductor arranged at a side of the mounting table and electrically connected to a mounting table electrode formed on a mounting surface of the mounting table, and a cleaning mechanism including a polishing unit for polishing a contact portion of the connection conductor, a brush cleaning unit for performing a brush-cleaning of the contact portion, and a contact resistance measuring unit for measuring a contact resistance of the contact portion. The mounting table electrode is in contact with a backside electrode of a semiconductor device of the semiconductor wafer. When the connection conductor is connected to the electrode plate, a backside electrode formed on a backside of the semiconductor device and the tester are electrically connected to each other.Type: GrantFiled: March 18, 2014Date of Patent: May 2, 2017Assignee: TOKYO ELECTRON LIMITEDInventors: Eiichi Shinohara, Munetoshi Nagasaka, Yoshiyasu Kato
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Publication number: 20160061882Abstract: A probe device includes an electrode plate arranged above a mounting table for mounting thereon a semiconductor wafer and electrically connected to a tester, a contact probe arranged at a side of the mounting table and electrically connected to a mounting table electrode of the mounting table. The contact probe includes a contact portion, having a top surface formed uneven, to be in contact with the electrode plate, and a cable connection portion formed as one unit with the contact portion. The contact portion and the cable connection portion are vertically movable by a biasing member provided below the cable connection portion. When the probes are made contact with electrodes of a semiconductor device of the semiconductor wafer by moving up the mounting table, the contact portion and the electrode plate are made contact with each other and the backside electrode and the tester are electrically connected to each other.Type: ApplicationFiled: March 18, 2014Publication date: March 3, 2016Inventors: Eiichi SHINOHARA, Munetoshi NAGASAKA, Ken TAOKA, Yoshiyasu KATO
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Publication number: 20160054357Abstract: A probe device includes an electrode plate arranged above a mounting table for mounting thereon a semiconductor wafer and electrically connected to a tester, a connection conductor arranged at a side of the mounting table and electrically connected to a mounting table electrode formed on a mounting surface of the mounting table, and a cleaning mechanism including a polishing unit for polishing a contact portion of the connection conductor, a brush cleaning unit for performing a brush-cleaning of the contact portion, and a contact resistance measuring unit for measuring a contact resistance of the contact portion. The mounting table electrode is in contact with a backside electrode of a semiconductor device of the semiconductor wafer. When the connection conductor is connected to the electrode plate, a backside electrode formed on a backside of the semiconductor device and the tester are electrically connected to each other.Type: ApplicationFiled: March 18, 2014Publication date: February 25, 2016Inventors: Eiichi SHINOHARA, Munetoshi NAGASAKA, Yoshiyasu KATO
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Patent number: 9261553Abstract: A probe apparatus of inspecting electrical characteristics of a power device having electrodes on both sides of a substrate at wafer level can reduce and uniformize a contact resistance between the electrode on a rear surface of the substrate and a mounting surface conductor of a chuck top. In the probe apparatus, an attracting device supports a semiconductor wafer W on the chuck top 12, and has many vertical fine holes in a pattern (diameter ? and pitch p) that satisfies the condition of ?<p?2?. For example, the diameter ? is about 0.25 mm, and the pitch p is about 0.5 mm.Type: GrantFiled: July 28, 2014Date of Patent: February 16, 2016Assignee: TOKYO ELECTRON LIMITEDInventors: Eiichi Shinohara, Munetoshi Nagasaka, Isamu Inomata, Kazuya Yano, Yoshiyasu Kato
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Publication number: 20150028907Abstract: A probe apparatus of inspecting electrical characteristics of a power device having electrodes on both sides of a substrate at wafer level can reduce and uniformize a contact resistance between the electrode on a rear surface of the substrate and a mounting surface conductor of a chuck top. In the probe apparatus, an attracting device supports a semiconductor wafer W on the chuck top 12, and has many vertical fine holes in a pattern (diameter ? and pitch p) that satisfies the condition of ?<p?2?. For example, the diameter ? is about 0.25 mm, and the pitch p is about 0.5 mm.Type: ApplicationFiled: July 28, 2014Publication date: January 29, 2015Inventors: Eiichi Shinohara, Munetoshi Nagasaka, Isamu Inomata, Kazuya Yano, Yoshiyasu Kato
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Patent number: 8678739Abstract: A carrier supporting apparatus is configured to support a carrier containing a plurality of plate-like objects to be processed, such that each object to be processed is arranged vertically at an interval in a horizontal attitude. The carrier includes multiple sets of supporting stages each arranged vertically at an interval, wherein each set of the supporting stages are configured to support the periphery of a bottom face of one object to be processed. The carrier supporting apparatus comprises a placing table adapted to place the carrier thereon, a lifting member that can be raised and lowered relative to the placing table, and a drive mechanism adapted to drive the lifting mechanism. When raised, the lifting member raises a bottom face of the object to be processed, which is supported on a set of the lowermost supporting stages in the carrier, and lifts it up from the supporting stages.Type: GrantFiled: June 20, 2005Date of Patent: March 25, 2014Assignee: Tokyo Electron LimitedInventors: Ikuo Ogasawara, Yoshiyasu Kato
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Publication number: 20090245979Abstract: A carrier supporting apparatus (10) according to the present invention is configured to support a carrier (C) containing, therein, a plurality of substantially plate-like objects (D) to be processed, such that each object to be processed is arranged vertically at an interval in a horizontal attitude. The carrier includes multiple sets of supporting stages (bottom faces of grooves (1A)) each arranged vertically at an interval, wherein each set of the supporting stages are configured to support the periphery of a bottom face of each one object (D) to be processed. The carrier supporting apparatus comprises a placing table (11) adapted to place the carrier (C) thereon, a lifting member (12) provided such that it can be raised and lowered relative to the placing table, and a drive mechanism adapted to drive the lifting mechanism to be raised and lowered.Type: ApplicationFiled: June 20, 2005Publication date: October 1, 2009Inventors: Ikuo Ogasawara, Yoshiyasu Kato
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Patent number: 7411384Abstract: A wafer chuck is provided with a plurality of pins which protrude and retreat in a plurality of through holes formed in a vertical direction on a mounting table, and an ascending/descending mechanism for ascending and descending the pins. The wafer chuck receives a wafer by protruding the pins from the mounting plane of the mounting table. On each upper end surface of the pin, a receiving surface part is provided for substantially not making a gap between the pin and each of the corresponding through holes and a mechanism for aligning the receiving surface part with the mounting surface is provided.Type: GrantFiled: March 6, 2007Date of Patent: August 12, 2008Assignee: Tokyo Electron LimitedInventors: Ikuo Ogasawara, Yoshiyasu Kato
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Publication number: 20070152691Abstract: A wafer chuck is provided with a plurality of pins which protrude and retreat in a plurality of through holes formed in a vertical direction on a mounting table, and an ascending/descending mechanism for ascending and descending the pins. The wafer chuck receives a wafer by protruding the pins from the mounting plane of the mounting table. On each upper end surface of the pin, a receiving surface part is provided for substantially not making a gap between the pin and each of the corresponding through holes and a mechanism for aligning the receiving surface part with the mounting surface is provided.Type: ApplicationFiled: March 6, 2007Publication date: July 5, 2007Applicant: TOKYO ELECTRON LIMITEDInventors: Ikuo OGASAWARA, Yoshiyasu Kato