Abstract: A method of forming metal carbide barrier layers for fluorocarbon films in semiconductor devices is described. The method includes depositing a fluorocarbon film on a substrate and depositing a metal-containing layer on the fluorocarbon film at a first temperature, where the metal-containing layer reacts with the fluorocarbon film to form a metal fluoride layer at an interface between the metal-containing layer and the fluorocarbon film. The method further includes heat-treating the metal-containing layer at a second temperature that is greater than the first temperature, wherein the heat-treating the metal-containing layer removes fluorine from the metal fluoride layer by diffusion through the metal-containing layer and forms a metal carbide barrier layer at the interface between the metal-containing layer and the fluorocarbon film, and wherein the metal-containing layer survives the heat-treating at the second temperature without blistering or pealing.

Abstract: The present invention relates to a manufacturing method for a semiconductor device, the method includes a process for forming an interlayer film on a substrate, a process for forming an opening in the interlayer, a process for forming a conductive layer which fills the opening, and a process for forming a cap film on the surface of the conductive layer. In the process for forming the cap film, a reduction process for the surface of the conductive layer and the forming of the film are performed simultaneously.

Abstract: A short-circuit protection circuit (12) configured to protect a switching element from an overcurrent includes: a potential decreasing means for decreasing a potential of a gate terminal when a main circuit current is an overcurrent; a feedback means for performing feedback control on an amount of a decrease in the gate potential caused by the potential decreasing means according to a current amount of the main circuit current; and a phase advancing means for performing phase advance compensation in a feedback loop under the feedback control.

Abstract: A method of forming an amorphous carbon layer on an insulating layer includes the step of forming an amorphous carbon layer using a plasma reaction process. The amorphous carbon layer is formed in an atmosphere containing a plasma excitation gas, a CxHy series gas, a silicon-containing gas, and an oxygen-containing gas.

Abstract: Embodiments of the invention describe methods for forming fluorocarbon (CF) films for semiconductor devices. According to one embodiment, the method includes providing a substrate, depositing a CF film on the substrate, generating, in the absence of a plasma, a treatment gas containing a gaseous specie having a molecular dipole, and treating the CF film with the treatment gas containing the gaseous specie having the molecular dipole to reduce the number of dangling bonds in the CF film. According to some embodiments, the method further includes depositing a second CF film on the treated CF film. According to some embodiments, the CF films may be deposited using a microwave plasma source containing a radial line slot antenna (RLSA).

Abstract: Provided is an electronic shelf label system capable of shortening a period of time required in distributing a large amount of information such as update information for all electronic shelf labels. In the electronic shelf label system, a communication control device (200) distributes shelf label information for an electronic shelf label. A relay station device (300a, 300b) has an electronic shelf label allocated thereto as a relay destination of the shelf label information, and relays only a piece of the shelf label information for the electronic shelf label device that is allocated to the relay station device. The electronic shelf label receives the shelf label information relayed by the relay station device (300a, 300b), to thereby perform display based on the shelf label information.

Abstract: Provided are an electronic shelf label system, a product price management device, a portable terminal device, an electronic shelf label device, a product price management method, a product price update method, a product price management program, and a product price update program, which are capable of changing display of an electronic shelf label in a place where the electronic shelf label is installed. A handy terminal (105) reads, from a shelf label (104), identification information of the shelf label (104), and transmits, to a communication controller (102), price information of a product that is input to the handy terminal (105) itself and the identification information of the shelf label (104).

Abstract: The present invention relates to a semiconductor device. The semiconductor device includes a fluorocarbon film formed on a substrate and a film containing metal formed on the fluorocarbon film, wherein the content amount of fluorine atom on the fluorocarbon film, which contacts the film containing metal, is in a predetermined range.

Abstract: A method for manufacturing semiconductor devices includes the steps of; forming an insulating film comprising a fluorine added carbon film on a substrate; forming a first barrier layer comprising a silicon nitride film on the insulating film by exposing a surface of the substrate formed with the insulating film to a plasma containing each active specie of a silicon and a nitride; forming a second barrier layer comprising a film containing silicon, carbon, and nitride on the first barrier layer by exposing a surface of the substrate formed with the first barrier layer to a plasma containing each active specie of the silicon and a carbon; and forming a film containing silicon and oxygen on the second barrier layer by exposing a surface of the substrate formed with the second barrier layer to a plasma containing each active specie of the silicon and an oxygen.

Abstract: An input processing device includes an input pad; a detector which detects a position of an indicating object coming into contact with the input pad; and a processor which controls a display state of an image displayed on a display on the basis of an input signal obtained from the detector, wherein an input surface of the input pad is provided with a detection region for detecting a specific input operation, and wherein when the processor receives the input signal corresponding to the specific input operation given from the indicating object onto the detection region, the processor rotates the image.

Abstract: A pad type input device is provided. The pad type input device includes an operation surface which includes a scroll area operated by an operation body. A detector is operative to detect a touch position of the operation body placed on the operation surface as positional information on a coordinate plane. A data processor is operative to acquire an operation signal obtained by the detector to perform a predetermined process. The data processor outputs a scroll signal that moves display contents in a predetermined scroll direction when the operation body placed on the scroll area is in a stop state where the operation body does not move, even after a predetermined time elapses.

Abstract: Provided is an amorphous carbon film having a high elastic modulus and a low thermal contraction rate with a suppressed low dielectric constant, a semiconductor device including the amorphous carbon film and a technology for forming the amorphous carbon film. Since the amorphous carbon film is formed by controlling an additive amount of Si (silicon) during film formation, it is possible to form the amorphous carbon film having a high elastic modulus and a low thermal contraction rate with a suppressed dielectric constant as low as 3.3 or less. Accordingly, when the amorphous carbon film is used as a film in the semiconductor device, troubles such as a film peeling can be suppressed.

Abstract: The present invention relates to a semiconductor device. The semiconductor device includes a fluorocarbon film formed on a substrate and a film containing metal formed on the fluorocarbon film, wherein the content amount of fluorine atom on the fluorocarbon film, which contacts the film containing metal, is in a predetermined range.

Abstract: The present invention relates to a manufacturing method for a semiconductor device, the method includes a process for forming an interlayer film on a substrate, a process for forming an opening in the interlayer, a process for forming a conductive layer which fills the opening, and a process for forming a cap film on the surface of the conductive layer. In the process for forming the cap film, a reduction process for the surface of the conductive layer and the forming of the film are performed simultaneously.

Abstract: An input device is provided. The input device includes a key input unit having a plurality of input keys and an input operation unit. A key input monitor monitors a key input to the key input unit. A timer measures a setting time upon the key input. A relay driver is operative to acquire and output an operation signal output from the input operation unit as a control signal and monitor the operation signal. The key input monitor is operative to initiate the timer when the key input to the key input unit is detected and set the relay driver to an output inhibition state. The relay driver is operative to release the output inhibition state such that the control signal is normally output when it is detected that the operation signal is a predetermined operation input within the setting time.

Abstract: An input processing device includes an input member having an input pad and a detecting section that detects a position where an indicator touches the input pad and a processing section that inputs a character or a figure on the basis of an input signal obtained from the input member, a document tool board and a handwriting tool board are displayed on a display screen and an input locus display region where a locus drawn with the input pad is displayed and a character display region where a character or a symbol recognized from the locus is displayed are displayed when a document tool and a handwriting tool are started by a processing operation of the processing section, and the character or the symbol displayed in the character display region is transferred to the document tool by a predetermined operation.

Abstract: An input processing device includes an input member having an input pad and a detecting section that detects a position where an indicator touches the input pad and a processing section that controls a display state on a display screen on the basis of an input signal obtained from the input member, and while an input tool for drawing at least one of character, symbol, and figure is being displayed on the display screen, the processing section displays a limited frame having a predetermined area on the display screen so as to overlap the input tool, and writes movement locus of the indicator touching the input pad within the limited frame and transfers the movement locus to the input tool such that at least one of the character, symbol, and figure is input to the input tool when the indicator touches the input pad.

Abstract: The present invention is a semiconductor device characterized by including a substrate, an insulating film consisting of a fluorine added carbon film formed on the substrate, a barrier layer consisting of a silicon nitride film and a film containing silicon, carbon, and nitride formed on the insulating film, and a hard mask layer having a film containing silicon and oxygen formed on the barrier layer, wherein the barrier layer consists of a silicon nitride film and a film containing silicon, carbon, and nitride that are laminated from the bottom in that order, and functions to prevent the fluorine in the fluorine added carbon film from moving to the hard mask layer.

Abstract: An input device is provided. The input device includes a key input unit having a plurality of input keys and an input operation unit. A key input monitor monitors a key input to the key input unit. A timer measures a setting time upon the key input. A relay driver is operative to acquire and output an operation signal output from the input operation unit as a control signal and monitor the operation signal. The key input monitor is operative to initiate the timer when the key input to the key input unit is detected and set the relay driver to an output inhibition state. The relay driver is operative to release the output inhibition state such that the control signal is normally output when it is detected that the operation signal is a predetermined operation input within the setting time.

Abstract: A pad type input device is provided. The pad type input device includes an operation surface which includes a scroll area operated by an operation body. A detector is operative to detect a touch position of the operation body placed on the operation surface as positional information on a coordinate plane. A data processor is operative to acquire an operation signal obtained by the detector to perform a predetermined process. The data processor outputs a scroll signal that moves display contents in a predetermined scroll direction when the operation body placed on the scroll area is in a stop state where the operation body does not move, even after a predetermined time elapses.