Patents by Inventor Yoshiyuki Shibamata

Yoshiyuki Shibamata has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for heating semiconductor wafers
    Patent number: 4449037
    Abstract: A system and method for evenly heating semiconductor wafers in a horizontal elongated reaction tube, wherein a furnace surrounding only a part of the length of the reaction tube is caused to move so as to pass along each wafer placed in the reaction tube. The system is especially useful for processing wafers at high temperatures for a short period of time.
    Type: Grant
    Filed: May 14, 1982
    Date of Patent: May 15, 1984
    Assignee: Fujitsu Limited
    Inventors: Yoshiyuki Shibamata, Hideo Onodera, Tadashi Kiriseko