Patents by Inventor Yoshiyuki Shichida

Yoshiyuki Shichida has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor device inspection apparatus
    Patent number: 8242443
    Abstract: A semiconductor device inspection apparatus having a noise subtraction function includes an electron gun, a stage for holding a sample, a main detector for detecting a signal discharged from the sample, and at least one or more sub detector for detecting noise generated from the sample or apparatus so that there can be obtained an image in which the noise caused by discharge generated on the sample or in the apparatus is removed from the signal. The noise subtraction function subtracts the noise detected by the sub detector from the signal detected by the main detector to remove or reduce the noise from the signal.
    Type: Grant
    Filed: August 20, 2010
    Date of Patent: August 14, 2012
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Yusuke Ominami, Yasuhiro Gunji, Yoshiyuki Shichida
  • SEMICONDUCTOR DEVICE INSPECTION APPARATUS
    Publication number: 20100314542
    Abstract: A semiconductor device inspection apparatus having a noise subtraction function includes an electron gun, a stage for holding a sample, a main detector for detecting a signal discharged from the sample, and at least one or more sub detector for detecting noise generated from the sample or apparatus so that there can be obtained an image in which the noise caused by discharge generated on the sample or in the apparatus is removed from the signal. The noise subtraction function subtracts the noise detected by the sub detector from the signal detected by the main detector to remove or reduce the noise from the signal.
    Type: Application
    Filed: August 20, 2010
    Publication date: December 16, 2010
    Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION
    Inventors: Yusuke OMINAMI, Yasuhiro Gunji, Yoshiyuki Shichida
  • Semiconductor device inspection apparatus
    Patent number: 7838828
    Abstract: A semiconductor device inspection apparatus having a noise subtraction function includes an electron gun, a stage for holding a sample, a main detector for detecting a signal discharged from the sample, and at least one or more sub detector for detecting noise generated from the sample or apparatus so that there can be obtained an image in which the noise caused by discharge generated on the sample or in the apparatus is removed from the signal. The noise subtraction function subtracts the noise detected by the sub detector from the signal detected by the main detector to remove or reduce the noise from the signal.
    Type: Grant
    Filed: June 3, 2008
    Date of Patent: November 23, 2010
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Yusuke Ominami, Yasuhiro Gunji, Yoshiyuki Shichida
  • SEMICONDUCTOR DEVICE INSPECTION APPARATUS
    Publication number: 20080308725
    Abstract: A semiconductor device inspection apparatus having a noise subtraction function includes an electron gun, a stage for holding a sample, a main detector for detecting a signal discharged from the sample, and at least one or more sub detector for detecting noise generated from the sample or apparatus so that there can be obtained an image in which the noise caused by discharge generated on the sample or in the apparatus is removed from the signal. The noise subtraction function subtracts the noise detected by the sub detector from the signal detected by the main detector to remove or reduce the noise from the signal.
    Type: Application
    Filed: June 3, 2008
    Publication date: December 18, 2008
    Inventors: Yusuke Ominami, Yasuhiro Gunji, Yoshiyuki Shichida