Patents by Inventor Yosinari Matusita

Yosinari Matusita has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma processing apparatus
    Patent number: 5110437
    Abstract: A plasma processing apparatus includes a chamber, a pair of spaced apart electrodes positioned within the chamber, a gas evacuation pipe for evacuating the chamber and a gas feed pipe for introducing gas into the chamber. At least one of the electrodes and the gas evacuation and feed pipes can be selectively moved by lifting devices in opposite directions along which the electrodes oppose each other. Further, a polarity of the voltage applied to the electrodes is reversible.
    Type: Grant
    Filed: December 27, 1990
    Date of Patent: May 5, 1992
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Yuichiro Yamada, Yosinari Matusita, Yuji Tutui