Patents by Inventor Yosuke HIRAGURI

Yosuke HIRAGURI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20170320238
    Abstract: A substrate processing tool is prevented from falling out of a tool holder. This substrate processing tool is a tool for attachment to a substrate processing apparatus. The substrate processing tool includes a tool main body, a blade edge portion, and an engaging portion. A holding portion that is to be held by the chuck portion of the substrate processing apparatus is formed in at least a portion of the tool main body. The blade edge portion is formed on one end side of the tool main body. The engaging portion is formed on the other end side of the tool main body, and protrudes farther than the surface of the tool main body.
    Type: Application
    Filed: November 26, 2015
    Publication date: November 9, 2017
    Inventors: Yosuke HIRAGURI, Noriyuki OGASAWARA, Shinichi SATO