Patents by Inventor Yosuke KATADA

Yosuke KATADA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate processing system, substrate processing method, and control program
    Patent number: 11086286
    Abstract: A substrate processing system includes a processing unit including processing modules and a first transfer device, a loading/unloading unit including a load port holding a substrate accommodating container and a second transfer device, and a control unit. The control unit controls the substrates to be sequentially transferred.
    Type: Grant
    Filed: June 26, 2019
    Date of Patent: August 10, 2021
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Toshiharu Hirata, Yosuke Katada, Takafumi Matsuhashi, Kunio Takano, Kouichi Nakajima
  • SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD, AND CONTROL PROGRAM
    Publication number: 20200012254
    Abstract: A substrate processing system includes a processing unit including processing modules and a first transfer device, a loading/unloading unit including a load port holding a substrate accommodating container and a second transfer device, and a control unit. The control unit controls the substrates to be sequentially transferred.
    Type: Application
    Filed: June 26, 2019
    Publication date: January 9, 2020
    Inventors: Toshiharu HIRATA, Yosuke KATADA, Takafumi MATSUHASHI, Kunio TAKANO, Kouichi NAKAJIMA