Patents by Inventor Yosuke Kuriyama

Yosuke Kuriyama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optical member, interferometer system, stage apparatus, exposure apparatus, and device manufacturing method
    Publication number: 20090310105
    Abstract: An optical member is irradiated with light in order to measure position information in a first direction. The optical member has a first reflecting surface, onto which light propagating in a second direction intersecting the first direction is incident, and a second reflecting surface, onto which light propagating in the second direction is incident. The first reflecting surface and second reflecting surface are optically connected, and light reflected by one among the first reflecting surface and second reflecting surface is incident on the other reflecting surface.
    Type: Application
    Filed: April 25, 2008
    Publication date: December 17, 2009
    Applicant: NIKON CORPORATION
    Inventor: Yosuke Kuriyama