Abstract: There is provided a technique that includes: a first gas supply line configured to supply a first gas to a substrate in a process chamber; a first exhaust line connected to a first pump and exhausting the first gas supplied to the substrate; a first valve installed at the first exhaust line; a second gas supply line configured to supply a second gas to the substrate in the process chamber; a second exhaust line connected to a second pump and exhausting the second gas supplied to the substrate; a second valve installed at the second exhaust line; and a controller capable of controlling the first valve and the second valve, so as to perform a first line change processing of exhausting the first gas supplied to the substrate toward the second pump via the second exhaust line, when determining that the first exhaust line transitioned into a predetermined state.

Abstract: There is provided a technique that includes executing a process recipe for processing a substrate; and executing a correction recipe for checking a characteristic value of a supply valve installed at a process gas supply line, wherein the act of executing the correction recipe comprises: supplying an inert gas into the process gas supply line for a certain period of time in a state where an adjusting valve that is installed at an exhaust portion of a process furnace and adjusts an internal pressure of the process furnace is fully opened; detecting a pressure value in a supply pipe provided with the supply valve while supplying the inert gas into the process gas supply line in the state where the adjusting valve is fully opened; and calculating the characteristic value of the supply valve based on the detected pressure value.

Abstract: There is provided a technique that includes executing a process recipe for processing a substrate; and executing a correction recipe for checking a characteristic value of a supply valve installed at a process gas supply line, wherein the act of executing the correction recipe comprises: supplying an inert gas into the process gas supply line for a certain period of time in a state where an adjusting valve that is installed at an exhaust portion of a process furnace and adjusts an internal pressure of the process furnace is fully opened; detecting a pressure value in a supply pipe provided with the supply valve while supplying the inert gas into the process gas supply line in the state where the adjusting valve is fully opened; and calculating the characteristic value of the supply valve based on the detected pressure value.

Abstract: A heating part of covering and heating a gas pipe includes: a thermal insulation portion disposed outside a heat generation body; an enclosure configured to enclose the thermal insulation portion and the heat generation body; a fastening part installed outside the enclose and configured to fasten one end portion and the other end portion of the enclosure in a state in which the one end portion and the other end portion of the enclosure adjoin each other; and a temperature sensing part disposed at the side of the gas pipe with respect to the enclosure at a position facing a surface of the gas pipe and formed in a plate shape with a major surface thereof oriented toward the gas pipe.

Abstract: Provided is an image forming unit contained in a flexible bag and held to allow a cushion member to absorb shock. The image forming unit includes: an image carrier on which an electrostatic latent image is formed; a developing device including a developing unit that is configured to develop the electrostatic latent image by turning around a turning center and coming into contact with the image carrier; and a developer accommodating portion that accommodates a developer for use in the developing device. The image forming unit also includes a restricting portion that is provided on an outermost portion of the developing device to come into contact with the cushion material so that rotation of the developing device is restricted.

Abstract: A sensor holder includes a holder body that accommodates a sensor, a first snap fit that presses the sensor from a rear surface of the sensor, and two second snap fits that fix the holder body to the housing at at least two points.

Abstract: A developing device includes a developer storing unit that stores a developer before use of the developing device, a developer containing unit that contains, when the developing device is used, the developer stored in the developer storing unit such that the developer is capable of being stirred by the developer containing unit, a developer holding unit that is provided in a portion of the developer containing unit and that holds the developer contained in the developer containing unit and moves the developer in a rotation direction, a sealing unit including a sealing tape portion that seals a slit-shaped opening formed in the developer storing unit along a longitudinal direction of the developer storing unit while the sealing tape portion is capable of being pulled out and that seals the slit-shaped opening of the developer storing unit by being removably fixed onto an edge of the opening and an extended tape portion that is folded at an end of the sealing tape portion in a longitudinal direction of the seal

Abstract: An image forming unit includes an image carrier, a developer carrier, a development housing, and a guide member. The image carrier forms an electrostatic latent image. The developer carrier is in contact with the image carrier while rotating about a rotation axis and facing the image carrier to develop the electrostatic latent image. The development housing accommodates a developer and rotatably supports the developer carrier at one end with an opening portion that is open to the image carrier. The development housing includes an agitation path in which the developer is agitated and a feed path through which the developer is fed to the developer carrier.

Abstract: An image forming unit includes an image carrier, a developer carrier, a development housing, and a guide member. The image carrier forms an electrostatic latent image. The developer carrier is in contact with the image carrier while rotating about a rotation axis and facing the image carrier to develop the electrostatic latent image. The development housing accommodates a developer and rotatably supports the developer carrier at one end with an opening portion that is open to the image carrier. The development housing includes an agitation path in which the developer is agitated and a feed path through which the developer is fed to the developer carrier.

Abstract: Provided is an image forming unit contained in a flexible bag and held to allow a cushion member to absorb shock. The image forming unit includes: an image carrier on which an electrostatic latent image is formed; a developing device including a developing unit that is configured to develop the electrostatic latent image by turning around a turning center and coming into contact with the image carrier; and a developer accommodating portion that accommodates a developer for use in the developing device. The image forming unit also includes a restricting portion that is provided on an outermost portion of the developing device to come into contact with the cushion material so that rotation of the developing device is restricted.

Abstract: A sensor holder includes a holder body that accommodates a sensor, a first snap fit that presses the sensor from a rear surface of the sensor, and two second snap fits that fix the holder body to the housing at at least two points.

Abstract: A developing device includes a developer storing unit that stores a developer before use of the developing device, a developer containing unit that contains, when the developing device is used, the developer stored in the developer storing unit such that the developer is capable of being stirred by the developer containing unit, a developer holding unit that is provided in a portion of the developer containing unit and that holds the developer contained in the developer containing unit and moves the developer in a rotation direction, a sealing unit including a sealing tape portion that seals a slit-shaped opening formed in the developer storing unit along a longitudinal direction of the developer storing unit while the sealing tape portion is capable of being pulled out and that seals the slit-shaped opening of the developer storing unit by being removably fixed onto an edge of the opening and an extended tape portion that is folded at an end of the sealing tape portion in a longitudinal direction of the seal

Abstract: There is provided a technique that includes executing a process recipe for processing a substrate; and executing a correction recipe for checking a characteristic value of a supply valve installed at a process gas supply line, wherein the act of executing the correction recipe comprises: supplying an inert gas into the process gas supply line for a certain period of time in a state where an adjusting valve that is installed at an exhaust portion of a process furnace and adjusts an internal pressure of the process furnace is fully opened; detecting a pressure value in a supply pipe provided with the supply valve while supplying the inert gas into the process gas supply line in the state where the adjusting valve is fully opened; and calculating the characteristic value of the supply valve based on the detected pressure value.

Abstract: A heating part of covering and heating a gas pipe includes: a thermal insulation portion disposed outside a heat generation body; an enclosure configured to enclose the thermal insulation portion and the heat generation body; a fastening part installed outside the enclose and configured to fasten one end portion and the other end portion of the enclosure in a state in which the one end portion and the other end portion of the enclosure adjoin each other; and a temperature sensing part disposed at the side of the gas pipe with respect to the enclosure at a position facing a surface of the gas pipe and formed in a plate shape with a major surface thereof oriented toward the gas pipe.