Patents by Inventor Yosuke Tatsuzaki

Yosuke Tatsuzaki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210379693
    Abstract: A processing system has: an irradiation optical system irradiating an object with an energy beam from a light source; an object placing apparatus on which the object is placed; a light receiving apparatus that is disposed at the object placing apparatus and that optically receives the energy beam from the irradiation optical system; and a measurement apparatus that measures at least one of the light receiving apparatus and a part that is related to the light receiving apparatus. The processing system moves the object placing apparatus to a position at which the light receiving apparatus optically receives the energy beam and moves the object placing apparatus to a position at which the measurement apparatus measures a position of the light receiving apparatus. .
    Type: Application
    Filed: October 31, 2019
    Publication date: December 9, 2021
    Applicant: NIKON CORPORATION
    Inventors: Shigeki EGAMI, Yosuke TATSUZAKI
  • Publication number: 20210370444
    Abstract: A processing apparatus has: a light irradiation apparatus configured to irradiate a coat formed on a base member with a processing light; and a controlling apparatus configured to control the light irradiation apparatus. The processing apparatus is configured to change a thickness of at least a part of the coat by irradiating the coat with the processing light so that the base member is not exposed from the coat.
    Type: Application
    Filed: October 25, 2017
    Publication date: December 2, 2021
    Applicant: NIKON CORPORATION
    Inventors: Masayuki SHIRAISHI, Shigeki EGAMI, Yosuke TATSUZAKI, Yuichi SHIBAZAKI
  • Publication number: 20210339359
    Abstract: A processing system has: a housing that houses an object; a processing apparatus that is disposed in the housing and that processes the object; a measurement apparatus that is disposed in the housing and that measures the object processed by the processing apparatus; and a control apparatus that sets a processing condition by using a measured result of the object.
    Type: Application
    Filed: October 31, 2018
    Publication date: November 4, 2021
    Applicant: NIKON CORPORATION
    Inventors: Shigeki EGAMI, Yosuke TATSUZAKI
  • Publication number: 20210205920
    Abstract: A processing apparatus has: a light irradiation apparatus that irradiates a surface of an object with a plurality of processing lights; and a first change apparatus that changes a relative positional relationship between light concentration positions of the plurality of processing lights in a direction that intersects with the surface of the object, the processing apparatus changes a thickness of a part of the object by irradiating the surface of the object with the plurality of processing lights.
    Type: Application
    Filed: October 25, 2017
    Publication date: July 8, 2021
    Applicant: NIKON CORPORATION
    Inventors: Masayuki SHIRAISHI, Yoshio KAWABE, Yosuke TATSUZAKI, Yuichi SHIBAZAKI
  • Publication number: 20210197312
    Abstract: A processing apparatus has: a light irradiation apparatus that irradiates a surface of an object with a processing light; and a measurement apparatus that measures a position of an irradiation area, which is formed on the surface of the object by the light irradiation apparatus, relative to the object.
    Type: Application
    Filed: October 25, 2017
    Publication date: July 1, 2021
    Applicant: NIKON CORPORATION
    Inventors: Masayuki SHIRAISHI, Shigeki EGAMI, Yoshio KAWABE, Yosuke TATSUZAKI, Baku OGASAWARA
  • Publication number: 20210197315
    Abstract: A processing apparatus has: a light irradiation apparatus that irradiates a surface of an object with a processing light; and a partition member that surrounds a space including an optical path between the surface of the object and an optical member that is disposed at the most object side in an optical system of the light irradiation apparatus that allows the processing light to pass therethrough.
    Type: Application
    Filed: October 25, 2018
    Publication date: July 1, 2021
    Applicant: NIKON CORPORATION
    Inventors: Masayuki SHIRAISHI, Yosuke TATSUZAKI
  • Publication number: 20200391325
    Abstract: A processing apparatus has: a light irradiation apparatus that irradiates a surface of an object with a processing light; a first position change apparatus that changes a position of at least one of the object and an irradiation area that is formed on the surface of the object by the light irradiation apparatus; and a control apparatus that controls the first position change apparatus to form a structure for reducing a frictional resistance of the surface of the object to a fluid by irradiating the surface of the object with the processing light while changing the position of at least one of the irradiation area and the object to change a thickness of a part of the object.
    Type: Application
    Filed: October 25, 2017
    Publication date: December 17, 2020
    Applicant: NIKON CORPORATION
    Inventors: Masayuki SHIRAISHI, Shigeki EGAMI, Yoshio KAWABE, Yosuke TATSUZAKI, Yuichi SHIBAZAKI
  • Publication number: 20200361036
    Abstract: A processing apparatus has: a light irradiation apparatus that irradiates a surface of an object with a plurality of processing lights; and a first change apparatus that changes an intensity distribution of the plurality of processing lights from the light irradiation apparatus on the surface of the object, the processing apparatus changes a thickness of a part of the object by irradiating the surface of the object with the plurality of processing lights.
    Type: Application
    Filed: October 25, 2017
    Publication date: November 19, 2020
    Applicant: NIKON CORPORATION
    Inventors: Masayuki SHIRAISHI, Yoshio KAWABE, Yosuke TATSUZAKI, Yuichi SHIBAZAKI
  • Publication number: 20200353560
    Abstract: A processing apparatus has: a light irradiation apparatus that irradiates a surface of an object with a processing light; and a measurement apparatus that measures a position of an irradiation area, which is formed on the surface of the object by the light irradiation apparatus, relative to the object.
    Type: Application
    Filed: October 25, 2017
    Publication date: November 12, 2020
    Applicant: NIKON CORPORATION
    Inventors: Masayuki SHIRAISHI, Shigeki EGAMI, Yoshio KAWABE, Yosuke TATSUZAKI, Yuichi SHIBAZAKI
  • Publication number: 20090153832
    Abstract: An apparatus and method effectively isolate vibrations in a lithography machine. The apparatus and method include a first control for actively reducing the vibrations in a first frequency range and a second control for actively reducing the vibrations in a second frequency range. The first control further includes a first actuator such as a force actuator and a static reference object with which relatively low-frequency vibrations are reduced. The second control further includes a second actuator such as a Piezo actuator and an air spring in which relatively high-frequency vibrations are reduced. The apparatus and method are applied to substantially prevent the vibrations on the floor from traveling to the mask stage in one embodiment.
    Type: Application
    Filed: December 18, 2007
    Publication date: June 18, 2009
    Inventors: Yosuke TATSUZAKI, Ping-Wei CHANG
  • Publication number: 20080013058
    Abstract: A high performance pneumatic spring apparatus is provided without increasing the sizes of the apparatus. The pneumatic spring apparatuses KB1-KB4 are provided with gas chambers AR filled with a gas at a prescribed pressure. The gas chamber AR is provided with an adjustment apparatus SW for adjusting a temperature change due to the capacity change of the gas chamber AR.
    Type: Application
    Filed: March 1, 2005
    Publication date: January 17, 2008
    Applicant: NIKON CORPORATION
    Inventor: Yosuke Tatsuzaki