Abstract: Provided are a system and method for automatically tracking a lot being moved between first and second manufacturing lines during semiconductor manufacturing. In one example, the method includes assigning a first state to the lot to indicate the lot's presence in the first manufacturing line. A trigger event indicating that the lot has been moved to the second manufacturing line may be identified, and a second state may be determined for the lot to reflect the lot's presence in the second manufacturing line. The second state may then be assigned to the lot.

Abstract: In an operating software system that provides one or more software components for use by a plurality of software programs, a method of providing an upgraded version of a software component for use by one or more of the software programs while at the same time allowing other programs of the plurality of programs to continue to operate with the older version. The method is particularly suitable for upgrading Component Object Models (COM's) as used in the Windows® operating system.

Abstract: The present disclosure relates generally to the field of semiconductor manufacturing. In one example, in a production flow of low-volume, high-precision semiconductor products, a method for controlling critical dimensions of a semiconductor product during a semiconductor processing operation in the production flow, the semiconductor processing operation requiring a desired energy value to achieve the critical dimensions includes: measuring a previously formed critical dimension on the product; calculating a first energy value based on the measured critical dimension and a desired critical dimension for the semiconductor processing operation; and obtaining the desired energy value based on the calculated first energy value and a previously-obtained desired energy for the semiconductor processing operation performed on a prior product in the production flow.

Abstract: The present disclosure relates generally to the field of semiconductor manufacturing. In one example, in a production flow of low-volume, high-precision semiconductor products, a method for controlling critical dimensions of a semiconductor product during a semiconductor processing operation in the production flow, the semiconductor processing operation requiring a desired energy value to achieve the critical dimensions includes: measuring a previously formed critical dimension on the product; calculating a first energy value based on the measured critical dimension and a desired critical dimension for the semiconductor processing operation; and obtaining the desired energy value based on the calculated first energy value and a previously-obtained desired energy for the semiconductor processing operation performed on a prior product in the production flow.

Abstract: Provided are a system and method for automatically tracking a lot being moved between first and second manufacturing lines during semiconductor manufacturing. In one example, the method includes assigning a first state to the lot to indicate the lot's presence in the first manufacturing line. A trigger event indicating that the lot has been moved to the second manufacturing line may be identified, and a second state may be determined for the lot to reflect the lot's presence in the second manufacturing line. The second state may then be assigned to the lot.

Abstract: A method for controlling exposure energy on a wafer substrate, with a feedback process control signal of wafer thickness critical dimension, and with a feed forward process control signal of a compensation amount that compensates for thickness variations of an interlayer of the wafer substrate.

Abstract: In an operating software system that provides one or more software components for use by a plurality of software programs, a method of providing an upgraded version of a software component for use by one or more of the software programs while at the same time allowing other programs of the plurality of programs to continue to operate with the older version. The method is particularly suitable for upgrading Component Object Models (COM's) as used in the Windows® operating system.

Abstract: A method for recipe format parsing. The method comprises the steps of providing a recipe format having a first, second and third level respectively with a first tag, a plurality of second tags and recipe data, the first tag linked to one of the second tags and the second tags linked to the corresponding recipe data, reading the first tag of the first level, reading the second tag to which the first tag is linked, and reading the corresponding recipe data to which the read second tag is linked.