Abstract: A novel high-precision rigid-flexible coupling rotating platform includes a foundation, a rigid bearing, a bearing sleeve, a core rotating platform, a rotating driver and a coder; the bearing sleeve is fixed on the foundation; the rigid bearing is in rotatable drive connection with the core rotating platform, and connected with the foundation through the bearing sleeve; an upper surface of the core rotating platform is provided with a plurality of groups of flexible hinges; when the rotating driver applies a driving force to rotate the core rotating platform, the driving force elastically deforms the flexible hinge rings. The flexible hinges are used and disposed on the upper surface of the core rotating platform; without disassembling the whole rotating platform, a corresponding group of flexible hinges can be changed but an assembling relationship between other groups of flexible hinges cannot be broken.

Abstract: A control method for converting time-varying system into a time-invariant system, comprises: using (n?1)th to 0th order signals of an nth-order time-varying, system as feedback to set up a closed loop control for the time-varying system; acquiring real-time values of the coefficients in each order of the time-varying system through a sensor, and calculating variations between the real-time values and the initial values of the coefficients in each order through a controller; amplifying and summing the parameters of every order to obtain a measured disturbance; inputting the measured disturbance, a control signal from a controller and an nth-order signal into an extended state observer through to estimate the rest disturbance; summing up the measured and estimated disturbances to obtain total disturbances; and adjusting the above parameters in each order through the controller to convert the time-varying system into the tune-invariant system.

Abstract: A rigid-flexible coupling high-accuracy galvo scanning motor comprises: a stator, a rotor rotating relative to the stator, bearing seats and at least two groups of encoders. The rigid-flexible coupling bearings are installed on the rotating shaft of the rotor; each of the rigid-flexible coupling bearings comprises: a rigid bearing and a flexible hinge ring which is elastically deformable, and the flexible hinge ring is fixed in an inner ring of the rigid bearing; the at least two groups of encoders comprise: a first group of encoders and a second group of encoders; the first group of encoders is used to measure a rotation angle of the rotating shaft; and the second group of encoders is used to measure a rotation angle of the inner ring of the rigid bearing. A friction dead zone is avoided through the elastic deformation of the flexible hinge ring, thereby reducing a disturbance bandwidth.

Abstract: A rigid-flexible coupling motion platform driven by a ball screw includes a base, a linear guide rail fixed to the base, a rigid-flexible coupling platform, a servo motor, a ball screw, a guide rail sliding block, a displacement sensor and a driving controller. The rigid-flexible coupling platform includes a frame and a workbench. The frame and the workbench are connected through a flexible hinge; the servo motor is configured to drive the ball screw; the workbench is connected with the ball screw; the frame is connected with the linear guide rail by the guide rail sliding block; the displacement sensor is configured to feed back the position of the workbench; and the driving controller controls the ball screw to drive the workbench to move according to different control modes. The advantages of the ball screw drive and the rigid-flexible coupling motion platform are fully combined, and the positioning precision of the platform is greatly improved.

Abstract: A novel high-precision rigid-flexible coupling rotating platform includes a foundation, a rigid bearing, a bearing sleeve, a core rotating platform, a rotating driver and a coder; the bearing sleeve is fixed on the foundation; the rigid bearing is in rotatable drive connection with the core rotating platform, and connected with the foundation through the bearing sleeve; an upper surface of the core rotating platform is provided with a plurality of groups of flexible hinges; when the rotating driver applies a driving force to rotate the core rotating platform, the driving force elastically deforms the flexible hinge rings. The flexible hinges are used and disposed on the upper surface of the core rotating platform; without disassembling the whole rotating platform, a corresponding group of flexible hinges can be changed but an assembling relationship between other groups of flexible hinges cannot be broken.

Abstract: A rigid-flexible coupling high-accuracy galvo scanning motor comprises: a stator, a rotor rotating relative to the stator, bearing seats and at least two groups of encoders. The rigid-flexible coupling bearings are installed on the rotating shaft of the rotor; each of the rigid-flexible coupling bearings comprises: a rigid bearing and a flexible hinge ring which is elastically deformable, and the flexible hinge ring is fixed in an inner ring of the rigid bearing; the at least two groups of encoders comprise: a first group of encoders and a second group of encoders; the first group of encoders is used to measure a rotation angle of the rotating shaft; and the second group of encoders is used to measure a rotation angle of the inner ring of the rigid bearing. A friction dead zone is avoided through the elastic deformation of the flexible hinge ring, thereby reducing a disturbance bandwidth.

Abstract: A rigid-flexible coupling motion platform driven by a ball screw includes a base, a linear guide rail fixed to the base, a rigid-flexible coupling platform, a servo motor, a ball screw, a guide rail sliding block, a displacement sensor and a driving controller. The rigid-flexible coupling platform includes a frame and a workbench. The frame and the workbench are connected through a flexible hinge; the servo motor is configured to drive the ball screw; the workbench is connected with the ball screw; the frame is connected with the linear guide rail by the guide rail sliding block; the displacement sensor is configured to feed back the position of the workbench; and the driving controller controls the ball screw to drive the workbench to move according to different control modes. The advantages of the ball screw drive and the rigid-flexible coupling motion platform are fully combined, and the positioning precision of the platform is greatly improved.

Abstract: The present invention discloses a single-drive rigid-flexible coupling precision motion platform, including a machine base, a linear guide rail, a rigid-flexible coupling motion platform, a linear driver and a displacement sensor, wherein the rigid-flexible coupling motion platform includes a rigid frame, flexible hinges and a core motion platform; and the core motion platform of the rigid-flexible coupling motion platform is connected with the rigid frame through the flexible hinges. In this arrangement, the single-drive rigid-flexible coupling precision motion platform disclosed by the present invention can realize high-accuracy continuous change displacements of the platform, thereby avoiding displacement “jitter” caused by sudden change of acceleration. The present invention further discloses a realization method and an application including the above platform.

Abstract: A control method for converting time-varying system into a time-invariant system, comprises: using (n?1)th to 0th order signals of an nth-order time-varying, system as feedback to set up a closed loop control for the time-varying system; acquiring real-time values of the coefficients in each order of the time-varying system through a sensor, and calculating variations between the real-time values and the initial values of the coefficients in each order through a controller; amplifying and summing the parameters of every order to obtain a measured disturbance; inputting the measured disturbance, a control signal from a controller and an nth-order signal into an extended state observer through to estimate the rest disturbance; summing up the measured and estimated disturbances to obtain total disturbances; and adjusting the above parameters in each order through the controller to convert the time-varying system into the tune-invariant system.

Abstract: The present invention also discloses a multi-DOF (Degree of Freedom) large-stroke high-precision motion platform system using the guide mechanism. A large load-bearing guide mechanism comprises: a rigid frame for generating a large-stroke displacement to realize high-speed motion; a core motion platform connected with a motion portion of a non-contact actuator, connected with the rigid frame by a primary flexible hinge group and a secondary flexible hinge group, and used for generating a small-stroke precise displacement by elastic deformation of the flexible hinge groups under driving of the actuator.

Abstract: The present invention provides a mechanical and control integration design method, comprising: first building an initial model of a controlled object, and regarding the estimation of an undetermined part as a disturbance; performing parametric design to the determined part of the controlled object model to obtain a parameterized model; further truncating and simplifying the controlled object model according to dynamic response characteristics of the object model and the control target requirements to obtain an approximate model as a prediction model; measuring a system state, building a control performance judgment criterion, and calculating the difference with the calculation result of the prediction model to obtain the total disturbance of the system; designing a total disturbance eliminating link according to the order of the prediction model, and constructing and completing an auto-disturbance rejection controller.

Abstract: The present invention also discloses a multi-DOF (Degree of Freedom) large-stroke high-precision motion platform system using the guide mechanism. A large load-bearing guide mechanism comprises: a rigid frame for generating a large-stroke displacement to realize high-speed motion; a core motion platform connected with a motion portion of a non-contact actuator, connected with the rigid frame by a primary flexible hinge group and a secondary flexible hinge group, and used for generating a small-stroke precise displacement by elastic deformation of the flexible hinge groups under driving of the actuator.

Abstract: The present disclosure involves occasions where precise two-dimensional motion takes place, and is applicable to XY motion stages for precise displacement compensation. The present disclosure particularly involves a stiffness-frequency adjustable XY micromotion stage based on stress stiffening, which includes X-direction and Y-direction motion sub-stages and corresponding drivers and a micromotion working table. The micromotion stage uses membrane sets that have tension levels thereof adjusted by bolts as a flexible hinge, so as to achieve independent adjustment of the vibration frequency of the XY micromotion stage. The present disclosure implements the foregoing configuration based on prestressed membrane, so the frequency is adjustable. The inherent frequency of the micromotion stage can be adjusted before or during operation according to various working conditions and driving frequency.

Abstract: A common-stator macro/micro integrated precision motion one-dimensional linear motor assembly, includes a base, linear guide rails, slide blocks, a U-shaped linear motor stator, a macro motion rotor, a micro motion rotor and a macro/micro integrated platform. A macro and micro motion platforms are connected to form an integrated platform through an elastic member, an outer frame of the macro/micro integrated platform is mounted on the linear guide rails and the slide blocks, the U-shaped linear motor stator is arranged on the base, rotors are respectively mounted on the macro and micro motion platforms, and large-scale overall high-speed motion can be realized when macro and micro rotors are simultaneously driven, and when a motion deviation occurs, the micro motion platform realizes precise displacement output by virtue of elastic deformation due to small inertia and zero friction, and high-frequency motion deviation compensation can be realized by virtue of individual drive.

Abstract: The present invention proposes a macro-micro integrated compound platform with adjustable dynamic characteristics. When a macro platform mover and a micro platform mover are driven at the same time, the whole large-scale high-speed motion can be realized; when a motion deviation occurs, a micro motion platform can be driven separately to realize the high-frequency motion deviation compensation, because the micro motion platform has small inertia and zero friction and achieves precision displacement output through elastic deformation.

Abstract: The present invention discloses a single-drive rigid-flexible coupling precision motion platform, including a machine base, a linear guide rail, a rigid-flexible coupling motion platform, a linear driver and a displacement sensor, wherein the rigid-flexible coupling motion platform includes a rigid frame, flexible hinges and a core motion platform; and the core motion platform of the rigid-flexible coupling motion platform is connected with the rigid frame through the flexible hinges. In this arrangement, the single-drive rigid-flexible coupling precision motion platform disclosed by the present invention can realize high-accuracy continuous change displacements of the platform, thereby avoiding displacement “jitter” caused by sudden change of acceleration. The present invention further discloses a realization method and an application including the above platform.

Abstract: The present disclosure relates to a macro-micro composite grating ruler measuring system based on conversion and amplification in vertical and horizontal directions. The macro-micro composite grating ruler includes a grating ruler, a macro-micro reading system moving with respect to the grating ruler, and a counting and image processing module. The macro-micro reading system faces grating strip datum and is parallel to the grating ruler. The system further includes a measuring reference line. The measuring reference line obtained by the image sensor together with grating strips forms an image overlap in the counting and image processing module. The measuring reference line and the grating strip jointly include an angle ?. With the foregoing configuration, the present invention is compatible with the existing incremental grating rulers and absolute grating rulers, so is highly applicable.

Abstract: A composite frequency-adjustable shock absorber is provided, comprising a motion main machine stand bar and a shock absorption device, which are arranged on a foundation carrier platform; the shock absorption device is divided into an upper shock absorption device and a lower shock absorption device, the shock absorption device is arranged on a base with an inner cavity, and the upper shock absorption device for suppressing the low-frequency vibration and the lower shock absorption device for absorbing additional high-frequency vibration are connected in series; the upper shock absorption device comprises an elastic component based on a flexible hinge group and a prestress adjusting device, the flexible hinge group is arranged in the inner cavity of the base, the prestress adjusting device for adjusting the inherent frequency of the flexible hinge group is connected with the flexible hinge group, and the motion main machine stand bar is fixed on a load bearing portion of the flexible hinge group.

Abstract: A high-speed platform motion parameter self-tuning method based on model identification and equivalent simplification is provided, comprising: establishing a test of a motion state of a high-speed platform, identifying model parameters, and optimizing motion parameters of an equivalent simplified model; selecting any motion function from a pre-set parameterized curve, setting initial parameters, and driving the high-speed platform to move under the action of a controller and an actuator; collecting dynamic response information of the platform, calculating dynamic characteristic information of the platform such as stiffness, frequency, damping and the like; establishing a dynamic response equivalent simplified model by using the acquired dynamic characteristic information, and performing the optimization constrained by meeting motion precision and targeting at shorter execution time for the motion parameters in the selected parameterized motion function to obtain the optimum parameters.

Abstract: The present invention proposes a linear motor common stator dual-drive macro/micro integrated high-speed precision motion one-dimensional platform, including a base, linear guide rails, slide blocks, a U-shaped linear motor stator, a macro motion rotor, a micro motion rotor and a macro/micro integrated platform.