Patents by Inventor Youfel Chen

Youfel Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for cleaning/drying hydrophobic wafers
    Patent number: 6468362
    Abstract: A method and an apparatus that uses a surfactant to clean a hydrophobic wafer is provided. In a first aspect, the method may clean and dry a wafer without applying pure DI water to the wafer. In a second aspect, the method may clean a wafer by applying pure DI water to the wafer only for a short duration of time such that the DI water application ceases prior to or as soon as a surfactant solution is rinsed from the wafer thereafter the wafer is dried. In a further aspect a hydrophobic wafer is maintained wetted with surfactant as it is transferred between cleaning apparatuses and is rinsed via diluted surfactant or via a brief DI water spray and is thereafter dried.
    Type: Grant
    Filed: August 23, 2000
    Date of Patent: October 22, 2002
    Assignee: Applied Materials, Inc.
    Inventors: Youfel Chen, Brian J Brown, Boris Fishkin, Fred C Redeker