Patents by Inventor Youhei Endo

Youhei Endo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Manufacturing method and manufacturing apparatus of device
    Patent number: 8883632
    Abstract: A manufacturing method of a device including: a first process in which a barrier film is formed on a substrate with a concave portion provided on one surface thereof so as to cover an inner wall surface of the concave portion; a second process in which a conductive film is formed so as to cover the barrier film; and a third process in which the conductive film is melted by a reflow method, wherein the method includes a process ? between the second process and the third process, in which the substrate with the barrier film and the conductive film laminated thereon in this order is exposed to an atmosphere under a pressure A for a time period B, and wherein in the process ?, control is carried out such that a product of the pressure A and the time period B is not greater than 6×10?4 [Pa·s].
    Type: Grant
    Filed: January 9, 2013
    Date of Patent: November 11, 2014
    Assignee: ULVAC, Inc.
    Inventors: Youhei Endo, Shuji Kodaira, Yuta Sakamoto, Junichi Hamaguchi, Yohei Uchida, Yasushi Higuchi, Shinya Nakamura, Kazuyoshi Hashimoto, Yoshihiro Ikeda, Hiroaki Iwasawa