Abstract: A medium conveying apparatus has: a conveying roller shaft arranged so as to be movable vertically; a pressing member which presses the conveying roller shaft in plural positions; and an urging member which urges the pressing member toward a conveying path of a medium. The whole pressing member is pushed up when the medium is inserted and a part of the pressing member is pushed up. Since the pressing member presses the conveying roller shaft in the medium width direction with a uniform pressing force, the uniform pressing force is applied to the medium in the width direction. The occurrence of a variation in the conveying forces and the occurrence of the oblique movement of the medium can be avoided. The medium can be stabilized and conveyed with the sufficient conveying force.

Abstract: A storage system includes a storage controller connected to higher-level devices and a plurality of storages connected to the storage controller for storing data from the higher-level devices. The storage controller includes a channel controller for establishing interface for the higher-level devices, the channel controller including trace information representing details of the interface, and storages for storing the trace information from the channel controller in a format which can be accessed by the higher-level devices. In this configuration, when the channel controller receives a trace information fetching indication from one of the higher-level devices, the channel controller transfers trace information to a cache memory and the storages or to the cache memory or the storages.

Abstract: A medium conveying apparatus has: a conveying roller shaft arranged so as to be movable vertically; a pressing member which presses the conveying roller shaft in plural positions; and an urging member which urges the pressing member toward a conveying path of a medium. The whole pressing member is pushed up when the medium is inserted and a part of the pressing member is pushed up. Since the pressing member presses the conveying roller shaft in the medium width direction with a uniform pressing force, the uniform pressing force is applied to the medium in the width direction. The occurrence of a variation in the conveying forces and the occurrence of the oblique movement of the medium can be avoided. The medium can be stabilized and conveyed with the sufficient conveying force.

Abstract: A portion, positioned at an opening portion of a resist, of an anti-reflection film is etched using an etching gas containing a substituted hydrocarbon with a halogen. At the time of etching of the anti-reflection film, a carbon component of the substituted hydrocarbon with a halogen is formed as a carbonaceous deposit on side walls, less irradiated with ions, of the opening portion of the resist, and on side walls of an opening portion, formed by etching, of the anti-reflection film. The deposit acts as a side wall blocking film, to suppress lateral extension of the opening portion of the resist and the opening portion of the anti-reflection film by etching, thus allowing anisotropic etching of the anti-reflection film. With this etching method, it is possible to etch the anti-reflection film with a resist taken as a mask while suppressing a variation in pattern dimension.

Abstract: A portion, positioned at an opening portion of a resist, of an anti-reflection film is etched using an etching gas containing a substituted hydrocarbon with a halogen. At the time of etching of the anti-reflection film, a carbon component of the substituted hydrocarbon with a halogen is formed as a carbonaceous deposit on side walls , less irradiated with ions, of the opening portion of the resist, and on side walls of an opening portion, formed by etching, of the anti-reflection film. The deposit acts as a side wall blocking film, to suppress lateral extension of the opening portion of the resist and the opening portion of the anti-reflection film by etching, thus allowing anisotropic etching of the anti-reflection film. With this etching method, it is possible to etch the anti-reflection film with a resist taken as a mask while suppressing a variation in pattern dimension.

Abstract: A storage system includes a storage controller connected to higher-level devices and a plurality of storages connected to the storage controller for storing data from the higher-level devices. The storage controller includes a channel controller for establishing interface for the higher-level devices, the channel controller including trace information representing details of the interface, and storages for storing the trace information from the channel controller in a format which can be accessed by the higher-level devices. In this configuration, when the channel controller receives a trace information fetching indication from one of the higher-level devices, the channel controller transfers trace information to a cache memory and the storages or to the cache memory or the storages.