Patents by Inventor Youichi Kumaki

Youichi Kumaki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for producing semiconductor substrate
    Patent number: 5696034
    Abstract: A method for producing a semiconductor substrate in which no autodoping occurs and slip dislocations in the substrate are reduced. The method involves forming a silicon nitride film on the backside of an n.sup.- -silicon substrate, epitaxially growing an n.sup.+ -buffer layer and a p.sup.+ -layer on the front side of the n.sup.- -silicon substrate, and decreasing the thickness of the n.sup.- -silicon substrate from the backside.
    Type: Grant
    Filed: August 28, 1995
    Date of Patent: December 9, 1997
    Assignee: Shin-Etsu Handotai Co., Ltd.
    Inventors: Masatake Katayama, Isao Moroga, Isao Shirai, Youichi Kumaki, Akio Kasahara