Patents by Inventor Youichi Nakayama
Youichi Nakayama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9766617Abstract: The substrate processing apparatus includes: a plurality of processing modules; a transfer mechanism; a controller; and a setting unit. The processing module processes with respect to the substrate. The transfer mechanism transfers the substrate ejected from the transfer container. The controller outputs control signals for transferring the substrate to the plurality of processing modules along a previously set transfer path through the transfer mechanism sequentially, and for processing with respect to the substrate in the processing module of a transfer destination based on a processing recipe in which a processing order and a processing condition are set. The setting unit sets a content of a non-recipe operation except for operations set in the processing recipe and a performing timing for performing the non-recipe operation by a control operation of the controller every processing module. The non-recipe operation is performed with respect to the processing modules.Type: GrantFiled: October 25, 2013Date of Patent: September 19, 2017Assignee: TOKYO ELECTRON LIMITEDInventors: Junichi Ogawa, Youichi Nakayama, Keiji Osada, Hiroaki Dewa
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Patent number: 9070728Abstract: A method of lowering a temperature of a substrate table uses a substrate W processing system including a first substrate table 2b; one or more processing chambers 1b, in each of which the first substrate table 2b is disposed, the processing chamber being configured to perform a predetermined process, with the substrate being placed on the first substrate table 2b; a substrate transfer apparatus 31 configured to transfer the substrate to the processing chamber 1b; a transfer chamber in which the substrate transfer apparatus 31 is disposed; and a second substrate table configured to cool the substrate. The method of lowering a temperature of a substrate table comprises the steps of first transfer in which the substrate W placed on the first substrate table 2b is transferred to the second substrate table by the substrate transfer apparatus 31, and second transfer in which the substrate placed on the second substrate table is transferred to the first substrate table 2b.Type: GrantFiled: December 2, 2010Date of Patent: June 30, 2015Assignee: TOKYO ELECTRON LIMITEDInventors: Kenichi Kobayashi, Youichi Nakayama, Kozo Kai, Kenji Shirasaka
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Publication number: 20140121814Abstract: The substrate processing apparatus includes: a plurality of processing modules; a transfer mechanism; a controller; and a setting unit. The processing module processes with respect to the substrate. The transfer mechanism transfers the substrate ejected from the transfer container. The controller outputs control signals for transferring the substrate to the plurality of processing modules along a previously set transfer path through the transfer mechanism sequentially, and for processing with respect to the substrate in the processing module of a transfer destination based on a processing recipe in which a processing order and a processing condition are set. The setting unit sets a content of a non-recipe operation except for operations set in the processing recipe and a performing timing for performing the non-recipe operation by a control operation of the controller every processing module. The non-recipe operation is performed with respect to the processing modules.Type: ApplicationFiled: October 25, 2013Publication date: May 1, 2014Applicant: TOKYO ELECTRON LIMITEDInventors: Junichi OGAWA, Youichi NAKAYAMA, Keiji OSADA, Hiroaki DEWA
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Patent number: 8612038Abstract: A processing system for performing a predetermined process on a target object includes one or more processing apparatuses that process the target object and a controller that controls the processing apparatuses. Here, the controller performs a control to select any one of a shutdown state in which a multiple number of end devices of the processing apparatuses are all stopped and a standby state in which some or all of the end devices are ready to perform a process on the target object, when the controller is shut down.Type: GrantFiled: June 24, 2010Date of Patent: December 17, 2013Assignee: Tokyo Electron LimitedInventors: Kenichi Kobayashi, Youichi Nakayama, Keiichiro Shiki
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Publication number: 20110114298Abstract: A method of lowering a temperature of a substrate table uses a substrate W processing system including a first substrate table 2b; one or more processing chambers 1b, in each of which the first substrate table 2b is disposed, the processing chamber being configured to perform a predetermined process, with the substrate being placed on the first substrate table 2b; a substrate transfer apparatus 31 configured to transfer the substrate to the processing chamber 1b; a transfer chamber in which the substrate transfer apparatus 31 is disposed; and a second substrate table configured to cool the substrate. The method of lowering a temperature of a substrate table comprises the steps of first transfer in which the substrate W placed on the first substrate table 2b is transferred to the second substrate table by the substrate transfer apparatus 31, and second transfer in which the substrate placed on the second substrate table is transferred to the first substrate table 2b.Type: ApplicationFiled: December 2, 2010Publication date: May 19, 2011Applicant: TOKYO ELECTRON LIMITEDInventors: Kenichi KOBAYASHI, Youichi Nakayama, Kozo Kai, Kenji Shirasaka
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Publication number: 20100292809Abstract: A processing system for performing a predetermined process on a target object includes one or more processing apparatuses that process the target object and a controller that controls the processing apparatuses. Here, the controller performs a control to select any one of a shutdown state in which a multiple number of end devices of the processing apparatuses are all stopped and a standby state in which some or all of the end devices are ready to perform a process on the target object, when the controller is shut down.Type: ApplicationFiled: June 24, 2010Publication date: November 18, 2010Applicant: TOKYO ELECTRON LIMITEDInventors: Kenichi Kobayashi, Youichi Nakayama, Keiichiro Shiki
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Patent number: 7692916Abstract: A plasma processing apparatus includes a process container configured to accommodate a target substrate and to be vacuum-exhausted. A first electrode and a second electrode are disposed opposite each other within the process container. A process gas supply unit is configured to supply a process gas into the process container. An RF power supply is configured to apply an RF power to the first electrode or second electrode to generate plasma of the process gas. A DC power supply is configured to apply a DC voltage to the first electrode or second electrode. A control section is configured to control the RF power supply and the DC power supply such that the DC power supply causes the DC voltage applied therefrom to reach a voltage set value, when or after the RF power supply starts applying the RF power.Type: GrantFiled: March 31, 2006Date of Patent: April 6, 2010Assignee: Tokyo Electron LimitedInventors: Naoki Matsumoto, Hideaki Tanaka, Hisashi Fujiwara, Chishio Koshimizu, Fumiaki Koiwa, Toshiyuki Kobayashi, Youichi Nakayama, Hiroshi Nakamura
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Patent number: 7266418Abstract: A substrate processing apparatus, which includes a plurality of process chambers for processing a substrate and a transfer part for carrying in and carrying out the substrate to and from the plurality of process chambers, includes a transfer history recording part, a process history recording part, and an alarm history recording part. The transfer history recording part relates history information concerning a transfer of the substrate by the transfer part to each substrate, and records the history information as first history information. The process history recording part relates history information concerning a process state of the substrate in each of the plurality of process chambers to each substrate subject to be processed, and records the history information as second history information.Type: GrantFiled: November 22, 2005Date of Patent: September 4, 2007Assignee: Tokyo Electron LimitedInventors: Youichi Nakayama, Daisuke Morisawa
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Publication number: 20070029194Abstract: A plasma processing apparatus includes a process container configured to accommodate a target substrate and to be vacuum-exhausted. A first electrode and a second electrode are disposed opposite each other within the process container. A process gas supply unit is configured to supply a process gas into the process container. An RF power supply is configured to apply an RF power to the first electrode or second electrode to generate plasma of the process gas. A DC power supply is configured to apply a DC voltage to the first electrode or second electrode. A control section is configured to control the RF power supply and the DC power supply such that the DC power supply causes the DC voltage applied therefrom to reach a voltage set value, when or after the RF power supply starts applying the RF power.Type: ApplicationFiled: March 31, 2006Publication date: February 8, 2007Inventors: Naoki Matsumoto, Hideaki Tanaka, Hisashi Fujiwara, Chishio Koshimizu, Fumiaki Koiwa, Toshiyuki Kobayashi, Youichi Nakayama, Hiroshi Nakamura
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Publication number: 20060224265Abstract: A substrate processing apparatus, which includes a plurality of process chambers for processing a substrate and a transfer part for carrying in and carrying out the substrate to and from the plurality of process chambers, includes a transfer history recording part, a process history recording part, and an alarm history recording part. The transfer history recording part relates history information concerning a transfer of the substrate by the transfer part to each substrate, and records the history information as first history information. The process history recording part relates history information concerning a process state of the substrate in each of the plurality of process chambers to each substrate subject to be processed, and records the history information as second history information.Type: ApplicationFiled: November 22, 2005Publication date: October 5, 2006Applicant: TOKYO ELECTRON LIMITEDInventors: Youichi Nakayama, Daisuke Morisawa