Abstract: A motor control method for transferring an object to be transferred by a moving object that moves by driving of a motor in a substrate processing apparatus, includes: a data acquisition process of acquiring, at different times, pieces of drive data which relate to the driving of the motor and vary with heat generation of the motor; and a transfer process of transferring the object to be transferred by controlling current to be supplied to the motor, based on each of the pieces of drive data, to compensate for displacement of the object to be transferred from a target transfer position due to the heat generation of the motor.

Abstract: A generation device and the like for generating long-life antibody chips which can be produced and held in stock is a generation device and the like for generating an antibody chip by binding antibody to a cup, including an antibody solution holder that holds antibody solution having antibody, a buffer solution holder that holds buffer solution, and an injector that injects solution into the cup. The injector has an inlet out of which solution is injected. The injector injects the buffer solution held by the buffer solution holder. The injector injects the antibody solution held by the antibody solution holder with the inlet in the buffer solution in the cup.

Abstract: Relating to a solenoid used as a solenoid valve, a holding circuit and the like for suppressing the occurrence of back electromotive force, and preventing magnetic flux density from deterioration, without a major change of the conventional circuit constitution, is provided. A capacitor is connected in parallel with a resistance which is connected in series to a solenoid. The solenoid is driven at rated voltage by making a first switch and a second switch ON state and the solenoid is kept at holding voltage by making the first switch OFF state. The capacitor slows down the speed of change of applied voltage to the solenoid from the rated voltage to the holding voltage so that the back electromotive force of the solenoid is absorbed, which prevents the extinguishment of magnetic flux density.

Abstract: Relating to a solenoid used as a solenoid valve, a holding circuit and the like for suppressing the occurrence of back electromotive force, and preventing magnetic flux density from deterioration, without a major change of the conventional circuit constitution, is provided. A capacitor is connected in parallel with a resistance which is connected in series to a solenoid. The solenoid is driven at rated voltage by making a first switch and a second switch ON state and the solenoid is kept at holding voltage by making the first switch OFF state. The capacitor slows down the speed of change of applied voltage to the solenoid from the rated voltage to the holding voltage so that the back electromotive force of the solenoid is absorbed, which prevents the extinguishment of magnetic flux density.

Abstract: A generation device and the like for generating long-life antibody chips which can be produced and held in stock is a generation device and the like for generating an antibody chip by binding antibody to a cup, including an antibody solution holder that holds antibody solution having antibody, a buffer solution holder that holds buffer solution, and an injector that injects solution into the cup. The injector has an inlet out of which solution is injected. The injector injects the buffer solution held by the buffer solution holder. The injector injects the antibody solution held by the antibody solution holder with the inlet in the buffer solution in the cup.