Patents by Inventor Youichi Yatagai

Youichi Yatagai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of measuring resistivity of sidewall of contact hole
    Patent number: 7923268
    Abstract: A method of measuring a resistivity of a sidewall of a contact hole formed in a semiconductor device, wherein said semiconductor device includes a first electrode formed on a substrate; a second electrode formed on the first electrode with an insulating film in between; a resist pattern formed on the first electrode and the second electrode; a contact hole formed in the first electrode and the second electrode; and an organic film deposited on the sidewall of the contact hole, includes the steps of: placing a probe needle on the first electrode and the second electrode so that the probe needle contacts with the first electrode and the second electrode several times; establishing electrical conductivity of the probe needle relative to the first electrode and the second electrode; and measuring the resistivity of the organic film between the first electrode and the second electrode.
    Type: Grant
    Filed: August 25, 2009
    Date of Patent: April 12, 2011
    Assignee: Oki Semiconductor Co., Ltd.
    Inventors: Youichi Yatagai, Shinji Kawada, Seiji Samukawa
  • METHOD OF MEASURING RESISTIVITY OF SIDEWALL OF CONTACT HOLE
    Publication number: 20100068836
    Abstract: A method of measuring a resistivity of a sidewall of a contact hole formed in a semiconductor device, wherein said semiconductor device includes a first electrode formed on a substrate; a second electrode formed on the first electrode with an insulating film in between; a resist pattern formed on the first electrode and the second electrode; a contact hole formed in the first electrode and the second electrode; and an organic film deposited on the sidewall of the contact hole, includes the steps of: placing a probe needle on the first electrode and the second electrode so that the probe needle contacts with the first electrode and the second electrode several times; establishing electrical conductivity of the probe needle relative to the first electrode and the second electrode; and measuring the resistivity of the organic film between the first electrode and the second electrode.
    Type: Application
    Filed: August 25, 2009
    Publication date: March 18, 2010
    Inventors: Youichi Yatagai, Shinji Kawada, Seiji Samukawa