Patents by Inventor Youji Takagi

Youji Takagi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor fabrication apparatus and fabrication method thereof
    Patent number: 6503562
    Abstract: An epitaxial growth system is provided with a susceptor driving mechanism for rotationally driving a susceptor in a process chamber and this susceptor driving mechanism has a support shaft coupled to the susceptor, a driven portion, and an annular member with a plurality of permanent magnets arranged outside the driven portion. The driven portion is constructed in such structure that a coating for corrosion prevention consisting of a nickel coating, a chromium coating, and a metal oxide film formed by a passivation treatment with ozone is provided on a surface of a magnetic member.
    Type: Grant
    Filed: January 16, 2001
    Date of Patent: January 7, 2003
    Assignee: Applied Materials, Inc.
    Inventors: Kazuyoshi Saito, Youji Takagi
  • Wafer supporting jig and a decompressed gas phase growth method using such a jig
    Patent number: 5169453
    Abstract: A wafer supporting jig that allows formation of a film with an even thickness on a wafer as well as a decompressed gas-phase growth method utilizing such a jig.A wafer supporting jig according to the invention is realized in the form of a ring made of a heat-resistive material having a central opening.
    Type: Grant
    Filed: May 14, 1991
    Date of Patent: December 8, 1992
    Assignee: Toyoko Kagaku Co., Ltd.
    Inventor: Youji Takagi
  • Wafer supporting jig and a decompressed gas phase growth method using such a jig
    Patent number: 5169684
    Abstract: A there is disclosed a wafer supporting jig that allows formation of a film with an even thickness on a wafer as well as a decompressed gas-phase growth method utilizing such a jig.A wafer supporting jig according to the invention is realized in the form of a ring made of a heat-resistive material having a central opening.
    Type: Grant
    Filed: May 25, 1990
    Date of Patent: December 8, 1992
    Assignee: Toyoko Kagaku Co., Ltd.
    Inventor: Youji Takagi