Patents by Inventor Youko Toyomaru

Youko Toyomaru has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Defect-position identifying method for semiconductor substrate
    Patent number: 6320655
    Abstract: A defect-position identifying method for a semiconductor substrate comprises the steps of: forming at least three reference points on a semiconductor substrate; detecting the reference points and a defect on the semiconductor substrate by means of a first evaluating system, which is provided for evaluating the defect on the semiconductor substrate, to measure coordinate values of the reference points and the defect in a system of coordinates of the first evaluating system; detecting the reference points on the semiconductor substrate by means of a second evaluating system, which is provided for evaluating the defect on the semiconductor substrate, to measure coordinate values of the reference points in a system of coordinates of the second evaluating system; determining an affine transformation for transforming the system of coordinates of the first evaluating system to the system of coordinates of the second evaluating system on the basis of the coordinate values of each of the reference points in the first
    Type: Grant
    Filed: March 15, 2000
    Date of Patent: November 20, 2001
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Hiroshi Matsushita, Norihiko Tsuchiya, Youko Toyomaru