Abstract: An electrostatic chuck assembly includes a reference temperature sensor, a measurement zone temperature sensor, and a measurement zone temperature calculator. The reference temperature sensor measures a reference temperature of the electrostatic chuck. The measurement zone temperature sensor is spaced from the reference temperature sensor on the electrostatic chuck and senses temperature signals of a plurality measurement zones of the electrostatic chuck. The measurement zone temperature calculator calculates a temperature of each of the measurement zones by setting a measurement range within a temperature range, previously determined based on the reference temperature measured by the reference temperature sensor, and measures the temperature signal of each of the measurement zones sensed by the measurement zone temperature sensor within the measurement range.

Abstract: An electrostatic chuck assembly includes a reference temperature sensor, a measurement zone temperature sensor, and a measurement zone temperature calculator. The reference temperature sensor measures a reference temperature of the electrostatic chuck. The measurement zone temperature sensor is spaced from the reference temperature sensor on the electrostatic chuck and senses temperature signals of a plurality measurement zones of the electrostatic chuck. The measurement zone temperature calculator calculates a temperature of each of the measurement zones by setting a measurement range within a temperature range, previously determined based on the reference temperature measured by the reference temperature sensor, and measures the temperature signal of each of the measurement zones sensed by the measurement zone temperature sensor within the measurement range.

Abstract: An electric field generating apparatus for a combustion chamber, may include an electric field generator located within a space of the combustion chamber where combustion flames may be produced to create electric fields within the space of the combustion chamber through an applied predetermined voltage, a lead-in wire connected to the electric field generator to flow the predetermined voltage to the electric field generator, and a high voltage providing unit connected to the lead-in wire for selectively applying the predetermined voltage to the lead-in wire in accordance with an output signal of a controller generated depending on an operation condition of an engine.

Abstract: An electric field generating apparatus for a combustion chamber, may include an electric field generator located within a space of the combustion chamber where combustion flames may be produced to create electric fields within the space of the combustion chamber through an applied predetermined voltage, a lead-in wire connected to the electric field generator to flow the predetermined voltage to the electric field generator, and a high voltage providing unit connected to the lead-in wire for selectively applying the predetermined voltage to the lead-in wire in accordance with an output signal of a controller generated depending on an operation condition of an engine.