Patents by Inventor Young-Bum Hwangbo

Young-Bum Hwangbo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of forming metal layer pattern and method of manufacturing image sensor using the same
    Publication number: 20060166481
    Abstract: A method of forming a metal layer pattern comprises forming an interlayer insulating layer on a semiconductor substrate, forming a metal layer on the interlayer insulating layer, forming a mask pattern to expose a predetermined area of the metal layer, and forming a metal layer pattern by dry etching the exposed predetermined area of the metal layer with a substrate bias power of about 5 W to about 40 W.
    Type: Application
    Filed: January 10, 2006
    Publication date: July 27, 2006
    Inventors: Gyoo-Dong Kim, Young-Bum Hwangbo, Jong-Min Oh