Abstract: The present invention relates to an apparatus for detecting particles on a glass surface and a method thereof, and more specifically, to an apparatus for detecting particles on a glass surface and a method thereof for exactly inspecting particles which may be created on a glass surface where micro circuits are deposited. The apparatus for detecting the particles on the glass surface in accordance with the present invention comprises laser beam irradiators for detecting particles on a glass substrate on upper and lower sides of the glass substrate at certain intervals, respectively, and wherein the irradiators are configured so that beams emitted from the laser beam irradiators can be irradiated in a direction vertical to a transferring direction of the glass substrate, thereby exactly detecting particles detached to the glass surface without exception.

Abstract: A noncontact type suction gripping device suitable for lifting a flat object in a noncontact manner includes a housing section including a pressing part which forms a closed surface when being placed to closely face one surface of a flat object, an R part which extends from the pressing part to be convexly rounded when viewed from the flat object, a sidewall part which is formed such that at least a portion thereof linearly extends from the R part in a direction facing away from the flat object, and an air inlet part which is connected to the sidewall part to introduce air, supplied from the outside, into the housing section; and a nozzle section including a nozzle tip which is separated from an inner surface of the sidewall part by a predetermined gap such that air supplied through the air inlet part can be discharged toward the perpendicular direction on the flat object, and an inclined surface which is formed to have a gradually decreasing diameter from the nozzle tip toward the air inlet part, the nozzle

Abstract: The present invention relates to an apparatus for detecting particles on a glass surface and a method thereof, and more specifically, to an apparatus for detecting particles on a glass surface and a method thereof for exactly inspecting particles which may be created on a glass surface where micro circuits are deposited. The apparatus for detecting the particles on the glass surface in accordance with the present invention comprises laser beam irradiators for detecting particles on a glass substrate on upper and lower sides of the glass substrate at certain intervals, respectively, and wherein the irradiators are configured so that beams emitted from the laser beam irradiators can be irradiated in a direction vertical to a transferring direction of the glass substrate, thereby exactly detecting particles detached to the glass surface without exception.