Patents by Inventor Young Chang Eom

Young Chang Eom has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Photo-chemical vapor deposition apparatus having exchange apparatus of optical window and method of exchanging optical window therewith
    Patent number: 5810930
    Abstract: A photo-chemical vapor deposition ("photo-CVD") apparatus has exchange apparatus of optical window and method of exchanging optical window therewith. There photo-CVD apparatus has exchange apparatus of optical window which can replace an optical window blurred by attachment of materials produced by dissociation of reaction gas or materials used for disposition in a reaction chamber of a photo-CVD apparatus during photo-CVD reaction with a clean optical window without exposing the inside of the reaction chamber to the air and to the method of exchanging optical window of the photo-CVD apparatus using the exchange apparatus of optical window.
    Type: Grant
    Filed: March 11, 1996
    Date of Patent: September 22, 1998
    Assignee: Korea Electric Power Corporation
    Inventors: Young Chang Eom, In Ho Hwang, Koeng Su Lim, Chang Hyun Lee