Patents by Inventor Young-chuel Lee

Young-chuel Lee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD OF CONTROLLING SEMICONDUCTOR PROCESS DISTRIBUTION
    Publication number: 20120150330
    Abstract: A method of controlling process distribution of a semiconductor process includes receiving process distribution data representing the process distribution of the semiconductor process, receiving a parameter related to the process distribution, generating a virtual metrology model corresponding to the process distribution based on a relationship between the process distribution data and the parameter, and modifying a process variable affecting the process distribution based on the virtual metrology model.
    Type: Application
    Filed: September 23, 2011
    Publication date: June 14, 2012
    Inventors: Ho-Ki LEE, Kye-hyun Baek, Young-chuel Lee, Gyung-jin Min