Abstract: A cover structure for a light source includes a frame having an inner space, a driver, and an oxygen discharger. The frame is combined with the light source such that an object disposed in the inner space is covered by the frame, and the inner space is sealed by the combined frame and light source to provide a closed space between the frame and the light source enclosing the object. The driver combines the frame and the light source by moving the frame toward the light source such that the frame contacts the light source. The oxygen discharger creates a low-oxygen state in the closed space by discharging oxygen from the closed space.

Abstract: A cover structure for a light source includes a frame having an inner space, a driver, and an oxygen discharger. The frame is combined with the light source such that an object disposed in the inner space is covered by the frame, and the inner space is sealed by the combined frame and light source to provide a closed space between the frame and the light source enclosing the object. The driver combines the frame and the light source by moving the frame toward the light source such that the frame contacts the light source. The oxygen discharger creates a low-oxygen state in the closed space by discharging oxygen from the closed space.

Abstract: A die attach apparatus includes a stage, a collet member that is movable to apply load to the stage, a load measuring member that is arranged between the collet member and the stage and that measures load between the collet member and the stage, the load measuring member is divided into a plurality of loading measuring regions and the plurality of load measuring regions measure loads within the plurality of load measuring regions, respectively, and a controller member that determines whether the collet member is in a tilted state or a non-tilted state based on the loads measured within the plurality of load measuring regions by the load measuring member.